Glass substrate support used for vacuum coating, film coating system thereof, and conveying method of the film coating system

Abstract

The invention relates to a glass substrate support used for vacuum coating, a film coating system thereof, and a conveying method of the film coating system, and belongs to glass substrate conveying technology and critical process equipment in vacuum coating. The glass substrate support comprises at least one concave undersurface-closed or undersurface-hollow frame holding zone used for loading the glass substrate. The film coating system comprises a glass substrate support conveying device and a film coating device in parallel with the glass substrate support. According to the conveying method, the glass substrate support stands in an inclined manner on the glass substrate support conveying device, and the edges of the frame holding zone and the bottom line horizontal line in the horizontal direction of the glass substrate support form an inclined angle. The glass substrate support used for vacuum coating and the film coating system thereof are simple in structure. According to the conveying method, a fixture is replaced by setting position relations among the structure of the concave frame holding zone of the glass substrate support, the glass substrate support and the concave frame holding zone so as to achieve stable conveying of the glass substrate, thus overcoming low yield problems of the coating film due to influences of the fixture, such as glass substrate coating film shadow and small-particle contamination.

Description

technical field [0001] The invention belongs to the glass substrate transmission technology in vacuum coating, in particular to a glass substrate rack used for vacuum coating, a coating system and a transmission method of the coating system. Background technique [0002] Glass substrate is a basic component of liquid crystal display devices and one of the key basic materials for the flat panel display industry. A glass substrate is a thin glass sheet with an extremely smooth surface. The rapid growth of the flat panel display screen, low-e glass and smart glass markets requires coatings of various materials on the surface of the glass substrate. [0003] In the traditional vacuum coating process, the carrying and fixing of the glass substrate is realized by the glass substrate frame with the clamp. Although the glass substrate rack with the clamps can support the glass substrates and avoid the glass substrates from easily shaking, the introduction of the clamps brings some ...

AI Technical Summary

Problems solved by technology

However, the clips and supports are in direct contact with the surface of the glass substrate. In actual use, the clips and supports are affected by the vibration of the coating, causing scratches on the surface of the glass substrate, and there is still the problem of coating shadows. After the clips and supports are coated Coating defects caused by film shedding and small particle pollution and the possibility of glass substrate damage

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