Quasi-molecular ultraviolet radiation and plasma coupling integrated waste gas degrading device
An ultraviolet radiation and plasma technology, applied in separation methods, dispersed particle separation, chemical instruments and methods, etc., can solve the problems of shortened lamp life, easy breakdown of the medium, weakening the effect of plasma degrading waste gas, etc. Utilization, the effect of reducing breakdown voltage
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Embodiment 1
[0055] (Example 1, Excimer ultraviolet radiation and plasma coupling integrated device for degrading waste gas)
[0056] See figure 1 , The excimer ultraviolet radiation and plasma coupled integrated waste gas degradation device of this embodiment includes a gas collection hood 1, a cyclone separation device 2, a gas distributor, a reactor 5 and an induced draft fan. The gas collection hood 1 includes a first gas collection hood 11 and a second gas collection hood 12 ; the gas distributor includes a first gas distributor 3 and a second gas distributor 4 . The first gas collection hood 11, the cyclone separation device 2, the first gas distributor 3, the reactor 5, the second gas distributor 4 and the second gas collection hood 12 are arranged sequentially from bottom to top.
[0057] The air inlet of the first gas collecting hood 11 is connected with the exhaust gas generator gas outlet or the gas storage tank of the gas to be degraded, and the gas outlet of the first gas col...
Embodiment 2
[0096] (Example 2, a method for the integrated degradation of waste gas by excimer ultraviolet radiation and plasma coupling)
[0097] The method for degrading waste gas integrated with excimer ultraviolet radiation and plasma coupling in this embodiment uses the device described in Embodiment 1.
[0098] See Figure 9 , the process of excimer ultraviolet radiation and plasma coupling integrated degradation of exhaust gas is as follows: the exhaust gas from the exhaust gas generator or the exhaust gas storage tank is initially mixed by the cyclone separation device 2, and then further mixed evenly by the first gas distributor 3, and then in the Under the action of the induced draft fan, it enters the excimer ultraviolet radiation and plasma coupled integrated reactor 5 for purification. The outlet of the reactor 5 is 1m away from the reactor, and a sampling port is set, and the concentration of the reacted gas is detected by an online gas analyzer, and the gas degraded to the...
Embodiment 3
[0106] (Example 3, a method for the integrated degradation of waste gas by excimer ultraviolet radiation and plasma coupling)
[0107] What this embodiment degrades is simulated flow state dimethylamine waste gas, initial concentration 1800mg / m 3 .
[0108] See Figure 7 , the excimer ultraviolet radiation of the present embodiment and the method for the integrated degradation waste gas of plasma coupling are the same as embodiment 2, the difference is:
[0109] In step 1., fill Kr 200torr and Br to the gas-filled zone B between the second quartz tube 52 and the third quartz tube 53 2 5 torr.
[0110] In step ②, close the valve 37-3 of the air pipe 37-2 connected to the air passage 37, and open the piston 39-1 to make the air intake through hole 38 in the C area unblocked.
[0111] In step ③, turn on the high-voltage power supply 63 and adjust the applied voltage to 7.5kV; the wavelength of excimer ultraviolet radiation is 207nm.
[0112] In step ④, the flow rate of dime...
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