Planar two-dimensional time grating displacement sensor

Abstract

The invention provides a planar two-dimensional time grating displacement sensor. The planar two-dimensional time grating displacement sensor is composed of fixed array planes and a movable array plane, wherein the fixed array planes are arranged relatively in parallel in an up-down mode. Each fixed array plane is composed of a fixed array plane base body and exciting coils arranged on the surface of the fixed array plane base body. The movable array plane is composed of a movable array plane base body and induction coils arranged on the surface of the movable array plane base body. The single movable array plane is adopted to obtain magnetic signals at different positions of the fixed array planes according to the electromagnetic induction principle, and the magnetic signals (space information) are converted into electric signals (time information) and then processed according to the space-time coordinate transformation theory, so that the planar two-dimensional space displacement is obtained. Two linear displacement sensors do not need to be installed perpendicularly, a binary optical device prepared in a complex process is not needed, a complex optical path design is not needed, the fixed array planes and the movable array plane are prepared in a common semiconductor machining process, and consequently the planar two-dimensional time grating displacement sensor has the advantages of being simple in structure, low in cost, resistant to oil fouling and dust and high in impact vibration capacity.

Description

technical field [0001] The invention belongs to the technical field of precision measurement sensors, and in particular relates to a plane two-dimensional time grating displacement sensor. Background technique [0002] There are currently two types of sensors for plane two-dimensional displacement measurement. One is to install two linear displacement sensors vertically with a relative difference of 90° on the plane to obtain the plane two-dimensional linear displacement respectively, and the other is to use a single sensor Get the displacement of the two dimensions of the plane at the same time. Installing two linear displacement sensors vertically will bring Abbe errors to the measurement system, and the positioning accuracy of the clamping has a great influence on the measurement results, and at the same time occupies a large space, which is not conducive to small space measurement. Existing planar two-dimensional displacement sensors include two-dimensional gratings and...

AI Technical Summary

Problems solved by technology

Installing two linear displacement sensors vertically will bring Abbe error to the measurement system, and the positioning accuracy of the clamping will have a great influence on the measurement results, and occupy a large space at the same time, which is not conducive to small space measurement

Existing planar two-dimensional displacement sensors include two-dimensional gratings and two-dimensional capacitive gratings. The measurement accuracy of two-dimensional gratings depends on the manufacturing accuracy of binary optical devices, and the complex optical path design and manufacturing process make the cost higher

At the same time, the two-dimensional grating has poor resistance to oil, dust and shock vibration

The measurement range of the two-dimensional capacitive grid is small, and because the dielectric constant of the capacitor is easily affected by the temperature, humidity, oil and dust in the external environment, the sensor's protection ability is poor

However, the current time grating displacement sensor can only measure one-dimensional space (linear displacement or angular displacement), and cannot realize two-dimensional linear displacement measurement on a plane

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