Integrated hydrogen sensor made from mixed graphene film, noble metal particles and metallic oxide materials and preparation method thereof

Abstract

The invention discloses an integrated hydrogen sensor made from mixed graphene film, noble metal particles and metallic oxide materials and a preparation method of the integrated hydrogen sensor. The sensor comprises a substrate, a heating electrode, a heat-conducting insulation layer and a detection electrode; the heating electrode is placed on the substrate; the heat-conducting insulation layer is placed between the heating electrode and the detection electrode and further the sensor further comprises a metallic oxide film deposited on the detection electrode, the noble metal particles deposited on the metallic oxide film, and the graphene film covers the metallic oxide film on which the noble metal particles are deposited. The noble metal particles covering the metallic oxide film are single atoms, wherein the covering rate is 0.05-100 percent, the particle size is 0.2-0.4 nanometers, and the noble metal particles are randomly and uniformly arranged. The metallic oxide film is 10 nanometers to 2 micrometers in thickness. The graphene film is 0.5-1.2 nanometers in thickness. By adopting the integrated hydrogen sensor provided by the invention, high-sensitivity and high-selectivity detection and monitoring for hydrogen can be simultaneously achieved.

Description

technical field [0001] The invention belongs to the field of gas sensors, and in particular relates to an integrated hydrogen sensor of hybrid graphene film, noble metal particles and metal oxide materials and a preparation method thereof. Background technique [0002] Hydrogen, together with solar energy and nuclear energy, is known as the three major new energy sources due to its high combustion efficiency and non-polluting products. As a new energy source, hydrogen is widely used in aviation, power and other fields; at the same time, as a reducing gas and carrier gas, hydrogen plays an extremely important role in chemical industry, electronics, medical treatment, metal smelting, especially in the field of military defense. Value. However, hydrogen molecules are small and are easy to leak during production, storage, transportation and use. Since hydrogen is colorless, odorless, explosive, and its ignition point is only 585°C, and its content in the air is in the range of...

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Problems solved by technology

However, while the surface modification and doping of metal oxides have improved the sensitivity of sensitive materials to hydrogen and other gases

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