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Microcavity-staggered-reused photonic crystal sensor array structure with gradually changed waveguide vertical direction radius

A sensor array and vertical direction technology, applied in the field of photonic crystal sensors, can solve the problems of large size, limited number of sensors, unfavorable large-scale integrated circuit design, etc., achieve a wide usable frequency range, facilitate integrated use, and facilitate error detection Effect

Inactive Publication Date: 2014-09-17
BEIJING UNIV OF POSTS & TELECOMM
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Problems solved by technology

The above sensor arrays realize the integrated sensing on the same silicon substrate, but the relative size is relatively large, and the number of sensors that can be cascaded is limited, which is not conducive to the design of large-scale integrated circuits.

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  • Microcavity-staggered-reused photonic crystal sensor array structure with gradually changed waveguide vertical direction radius
  • Microcavity-staggered-reused photonic crystal sensor array structure with gradually changed waveguide vertical direction radius
  • Microcavity-staggered-reused photonic crystal sensor array structure with gradually changed waveguide vertical direction radius

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Embodiment Construction

[0034] The schematic diagram of photonic crystal sensor array structure model among the present invention is as Figure 4 As shown, it includes a photonic crystal slab with a tapered radius in the vertical direction of the waveguide, a W1 waveguide and four interleaved microcavities. The microcavities are all obtained by removing two air holes in the second row on the upper and lower sides of the W1 waveguide. The lattice constant a=414nm, the thickness of the structure is T=0.53a, the radius of the air hole in the radius gradient structure is r1=0.32a,r 2 = 0.28a. Refractive index n of dielectric silicon si = 3.48.

[0035] Because the difference in the refractive index of the air hole will affect the change of the resonant frequency of the microcavity, it is possible to form a photonic crystal sensor array for the detection of various analytes by injecting probes with different refractive indices into the air hole. The choice of microcavity type has an impact on the sens...

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Abstract

The invention relates to a sensor array structure formed by staggered reuse of photonic crystals with gradually changed waveguide vertical direction radius and four micro cavities, and belongs to the technical field of photonic crystal sensors. For the first time, the photonic crystals with gradually changed waveguide vertical direction radius are applied to the design of the sensor array structure, the size of the array structure is compressed, and conditions for large-scale integration of a photonic crystal sensor array are provided. According to the sensor array structure, waveguide vertical direction air hole radius is gradually changed from the middle to both sides, four point defect micro cavities are staggered and reused at both sides of a line defect waveguide, and four resonant fall peaks exist in a transmission spectrum of an output end. Each micro cavity has high quality factor (-104) and high transmittance. At the same time, each micro cavity can achieve alone sensing features and does not interfere with each other. The photonic crystal sensor array structure is extensible, and can simultaneously detect multiple analytes.

Description

technical field [0001] The invention relates to a photonic crystal with a gradually changing radius in the vertical direction of the waveguide. Four resonant microcavities are used to alternately couple to both sides of the line defect waveguide to form a sensor array structure, which belongs to the technical field of photonic crystal sensors. Background technique [0002] In recent years, photonic crystal sensors have been widely used in monolithic integrated circuits due to their small size and high sensitivity, and have strong research value. Photonic crystal sensors mainly use various structural types such as microcavities, ring cavities, slot waveguides, and heterostructures to realize sensing functions. At present, research on photonic crystal sensors is mainly focused on biochemical sensors (document 1, A.Falco, L.Faolain, and T.Krauss, "Chemical sensing in slotted photonic crystal heterostructure cavities," Appl.Phys.Lett.94, 063503( 2009)), pressure sensor (documen...

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Application Information

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IPC IPC(8): G01N21/41
Inventor 田慧平刘琦周健杨大全黄利军张攀纪越峰
Owner BEIJING UNIV OF POSTS & TELECOMM
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