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Preparation method for patterned thin film electret

An electret, patterned technology, applied in gaseous chemical plating, manufacturing of microstructure devices, processes for producing decorative surface effects, etc. The charging technology is not applicable, etc., to achieve the effect of good stability

Inactive Publication Date: 2014-09-24
HANGZHOU DIANZI UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, it has been found that the excellent performance of macroscopic electret substrates will deteriorate as the size of the material decreases, and the traditional electret charging technology is no longer applicable.

Method used

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  • Preparation method for patterned thin film electret
  • Preparation method for patterned thin film electret
  • Preparation method for patterned thin film electret

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0033] refer to figure 1 , after the polyfluoroethylene propylene (FEP) film is cleaned by ultrasonic waves, an aluminum electrode (the first metal electrode) with a thickness of 100 nm is evaporated on the lower surface of the polyfluoroethylene propylene (FEP) film 1 by thermal evaporation coating method; A grid-type aluminum electrode (second metal electrode) with a thickness of 100nm is vapor-deposited on the surface. The grid-type aluminum electrode is formed by setting five aluminum films at intervals, and the distance between two adjacent aluminum films is 2mm; Spacing array distribution.

[0034] In order to endow the FEP film with electret properties, it is necessary to use certain means to inject charges into the film body. This process is called injector (also known as charging or polarization). refer to figure 2 , The present invention adopts corona polarization injection pole, adopts AC high-voltage power supply 4 to generate corona discharge, the electric fiel...

Embodiment 2

[0038] refer to image 3 , in the second metal electrode, each metal film 2 is a ring arranged concentrically, and the difference between the radii of two adjacent rings is greater than 1 mm. Its polarization method is identical with embodiment 1.

Embodiment 3

[0040] 1. Influence of injector conditions on the charge storage performance of gate electrets

[0041] The present invention compares and studies the effects of methods such as alternating current (AC) corona injection, direct current (DC) corona injection, thermal polarization and the like on the charge storage performance. It is found that only alternating current (AC) corona injectors can form ideal patterned electric field distribution electrets. Although the direct current (DC) corona injector forms a high electret electric field, it cannot display a patterned electric field distribution. The distance between two adjacent aluminum films is 2 mm and 3 mm, respectively, and the temperature of the injection electrode is room temperature, 100 ° C, and 200 ° C, respectively. The initial surface potential values ​​of the patterned FEP electret of the corona injection electrode are shown in Table 1. In addition, it can also be seen from Table 1 that during AC corona injection,...

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Abstract

The invention relates to a preparation method for a patterned thin film electret. The method comprises the following steps of evaporating a first metal electrode on one surface of an electret substrate; evaporating a second metal electrode on the other surface of the electret substrate, wherein the second metal electrode consists of a plurality of metal films which are arranged at intervals, and the distance between every two adjacent metal films is more than 1mm; applying an alternating current high-voltage electric field for corona polarization, wherein the intensity of the electric field is 20 to 40KV / cm, the frequency of alternating current is 30 to 1,000Hz, the polarization temperature is 20 to 200 DEG C, and the polarization time is 5 to 60min; and cooling to the room temperature under the condition of keeping the voltage unchanged, and removing the electric field. The normal dimension of the prepared electret is micron dimension, the tangential dimension of the electret is millimeter dimension, and the electret is high in stability.

Description

technical field [0001] The invention relates to a preparation method of an electret, in particular to a preparation method of a patterned film electret. Background technique [0002] Electret (Electret) is a class of functional dielectric materials containing oriented dipoles (frozen or ferroelectric) or quasi-permanent space charges (surface or in vivo), electrostatic, piezoelectric and pyroelectric effects are the basic physical effect. Electrets have attracted widespread attention due to their ability to generate long-lasting and stable electrostatic fields. In recent years, with the development of micro-electro-mechanical systems (MEMS, Micro-Electro-Mechanical System), more and more electret substrates have been incorporated into MEMS devices, such as low-power electret generators and electret motors, sensors And transducers, nonlinear devices, electret microphones, magnetometers, etc. [0003] The micro-size of the electret substrate in MEMS devices is reflected in ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B81C1/00
Inventor 陈钢进
Owner HANGZHOU DIANZI UNIV
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