Multifunctional ion gun

Abstract

The invention discloses a multifunctional ion gun, comprising an ionization chamber, a first lens, a second lens, a first deflector plate, a second deflector plate, a slit, a four-way flange, a transition flange and a tapered cylinder, The ionization chamber, the first lens and the first deflection plate are located in the pipe of the four-way flange, and the first lens is located between the ionization chamber and the first deflection plate, and the first deflection plate is installed near the transition flange end, the ionization chamber is installed at the far end of the transition flange, the second lens, the second deflecting plate and the slit are located in the conical cylinder, the second deflecting plate is located between the second lens and the slit, and the second lens is installed At the proximal end of the transition flange, a slit is installed at the far end of the transition flange, and the cross flange and the tapered cylinder are connected through the transition flange. In order to achieve the purpose of compact structure, multiple functions, stable performance and enhanced ion beam transmission distance.

Description

technical field [0001] The invention relates to the fields of surface science application technology, ultra-high vacuum technology and ion beam technology, in particular to a multifunctional ion gun. Background technique [0002] In the field of surface science, the cleanliness of the sample surface has a crucial influence on the experiment. Argon ion sputtering is currently a standard method for cleaning surfaces in situ. [0003] In basic research, for example, low energy ion-scattering spectroscopy requires the use of low energy ion beams as probes to study surface composition. In the application of time-of-flight mass spectrometry, a pulsed ion beam is required. In the field of microfabrication, it is often necessary to use low-energy high-current ion beams to sputter samples to implement layer-by-layer peeling. [0004] All of the above experimental studies have put forward strict technical requirements for ion beams, but the existing ion guns cannot meet many experi...

AI Technical Summary

Problems solved by technology

There are defects such as complex ion source structure, difficult disassembly, and difficult maintenance

The cold cathode ion source mainly adopts the principle of Penning discharge, and its structure is relatively simple, but it requires high voltage power supply, and the generated ion beam current is unstable.

Generally speaking, the ion energy range of existing ion guns is narrow, the ion transmission distance is generally less than 100mm, the beam collimation is poor, and the beam spot size cannot be adjusted, which limits its application range

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