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Terahertz wave detector and manufacturing method thereof

A detector and terahertz technology, applied in the field of metamaterials and terahertz detection, can solve the problem of low absorption rate of terahertz waves, and achieve the effect of enhancing the absorption rate

Active Publication Date: 2014-11-12
UNIV OF ELECTRONIC SCI & TECH OF CHINA
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Problems solved by technology

[0007] The embodiment of the present invention solves the technical problem of the low absorption rate of the terahertz wave detector in the prior art by providing a terahertz wave detector and its preparation method, thereby achieving Achieve high absorption and convert absorption into electrical signals, providing the basis for terahertz imaging detection

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  • Terahertz wave detector and manufacturing method thereof
  • Terahertz wave detector and manufacturing method thereof
  • Terahertz wave detector and manufacturing method thereof

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Embodiment Construction

[0044] The embodiments of the present invention solve the technical problem of the low absorption rate of terahertz waves by the terahertz wave detector in the prior art by providing a terahertz wave detector and a preparation method thereof, thereby achieving the ability to detect terahertz waves in a specific terahertz range. High absorption can be achieved and the absorption can be converted into electrical signals, providing the basis for terahertz imaging detection.

[0045] In order to solve the above-mentioned technical problem of low absorption rate of terahertz waves by existing terahertz detectors, the general idea is as follows:

[0046] The terahertz wave detector used includes a top sensitive layer and a metamaterial metal hollow cross absorption layer located under the top sensitive layer. Since the absorption layer adopts the metal hollow cross structure of metamaterials, it is a center-symmetric structure, which can eliminate the device interference. The anisot...

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Abstract

The invention discloses a terahertz wave detector and a manufacturing method of the terahertz wave detector. The terahertz wave detector is used for detecting radiation in the terahertz wave band and comprises a top layer composite sensitive thin film layer and a cross-shaped metamaterial metal hollow absorbing layer located below the top layer composite sensitive thin film layer. A cross-shaped hollow graph is centrally symmetric, and the cross-shaped metamaterial metal hollow absorbing layer generates intense resonance absorption in the specific terahertz wave band and has an obvious absorption peak. Due to the characteristics of the centrally symmetric cross-shaped hollow graph, the cross-shaped metamaterial metal hollow absorbing layer is insensitive to the polarization and polarization direction of the incident terahertz waves, the direction of incident light is not required specially, the frequency range of resonance absorption through the metamaterial structure can be adjusted by changing the size of the cross-shaped graph, and maximum absorption in a certain specific wave band can be achieved. According to the terahertz wave detector, high absorption in the specific wave band can be achieved, the absorption frequency band is easy to adjust, detection sensitivity is high, and the terahertz wave detector is compatible with an MEMS technology, can be produced in an array mode and has wide application prospects.

Description

technical field [0001] The invention relates to the technical field of metamaterials and terahertz detection, in particular to a terahertz wave detector and a preparation method thereof. Background technique [0002] Terahertz (Terahertz, 1THz=10 12 Hz) frequency band refers to the frequency from 0.1THz to 10THz (wavelength 30μm~3mm), which is between the electromagnetic radiation area of ​​millimeter wave and infrared light sword. Understanding is very limited, so this band is known as the terahertz gap in the electromagnetic spectrum and is the last frequency window in the electromagnetic spectrum to be fully studied. The rapid development of ultrafast laser technology and semiconductor material science and technology in the past ten years has provided a stable and reliable excitation light source for the generation of terahertz pulses, and promoted the development and application of terahertz radiation in spectroscopy and imaging technology. The terahertz spectrum of ma...

Claims

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Application Information

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IPC IPC(8): H01L31/08H01L31/18G01J1/42
CPCG01J1/42Y02P70/50
Inventor 吴志明张也驰熊成蒋亚东吴雪飞王军
Owner UNIV OF ELECTRONIC SCI & TECH OF CHINA
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