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Thin film circulator with integrated microstrip and manufacturing method thereof

A circulator and microstrip technology, applied in waveguide-type devices, electrical components, circuits, etc., can solve problems such as reducing the integration of the circulator, reducing the operating bandwidth of the circulator, and affecting the circulator.

Inactive Publication Date: 2017-04-12
HANGZHOU DIANZI UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In this case, the dielectric parameters of the substrate will directly affect the performance of the circulator, including reducing the operating bandwidth of the circulator and reducing the integration of the circulator.

Method used

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  • Thin film circulator with integrated microstrip and manufacturing method thereof
  • Thin film circulator with integrated microstrip and manufacturing method thereof

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0023] In this embodiment, GaAs is used as the dielectric substrate; gold is used as the metal electrode; yttrium iron garnet ferrite is used as the ferromagnetic film.

[0024] Step 1, using pulsed laser deposition (PLD) technology to deposit a 2 micron thick gold film on the GaAs substrate; the deposition conditions are: the vacuum degree is 5 × 10-4Pa, the substrate temperature is room temperature, and the time is 1 hour

[0025] Step 2, using PLD technology to deposit a 50-micron thick yttrium-iron-garnet ferrite film on the gold film; the deposition conditions are: the vacuum degree is 1Pa, the substrate temperature is 700°C, and the time is 40 hours.

[0026] Step 3, annealing the ferrite film obtained in step 2 at 750° C. for 3 hours in an annealing furnace;

[0027] Step 4, continue to use the PLD technology to deposit a 2 micron thick gold film on the sample obtained in step 3; the deposition conditions are: the vacuum degree is 5×10-4Pa, the substrate temperature is ...

Embodiment 2

[0031] In this embodiment, MgO is used as the dielectric substrate; gold is used as the metal electrode; and yttrium iron garnet ferrite is used as the ferromagnetic film.

[0032] Step 1, using pulsed laser deposition (PLD) technology to deposit a 2 micron thick gold film on the MgO substrate; the deposition conditions are: the vacuum degree is 5 × 10-4Pa, the substrate temperature is room temperature, and the time is 1 hour

[0033] All the other steps are with embodiment 1

Embodiment 3

[0035] In this embodiment, GaAs is used as the dielectric substrate; gold is used as the metal electrode; nickel-zinc spinel ferrite is used as the ferromagnetic film.

[0036] Step 1, using pulsed laser deposition (PLD) technology to deposit a 2 micron thick gold film on the GaAs substrate; the deposition conditions are: the vacuum degree is 5 × 10-4Pa, the substrate temperature is room temperature, and the time is 1 hour

[0037] Step 2, using PLD technology to deposit a 70-micron-thick nickel-zinc spinel-type ferrite film on the gold film; the deposition conditions are: the vacuum degree is 1Pa, the substrate temperature is 700°C, and the time is 30 hours.

[0038] All the other steps are with embodiment 1

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Abstract

The invention discloses a thin film circulator which is of a novel structure and integrates a micro-strip, and belongs to the field of the electronic technology. The thin film circulator structurally comprises a microwave medium substrate, a metal bottom electrode, a ferromagnetic thin film, a micro-strip circulator Y joint and a hard magnet, and is characterized in that the metal bottom electrode is located between the ferromagnetic thin film and the micro-strip circulator Y joint. The thin film circulator largely reduces the influence on the performance of the circulator from the microwave medium substrate and improves the work bandwidth. The ferromagnetic thin film is used for replacing traditional ferromagnetic block materials, the weight and size of elements are reduced, and integration of the elements is improved.

Description

technical field [0001] The invention relates to a film circulator, in particular to a microstrip film circulator using ferrite material and a manufacturing method thereof. Background technique [0002] Microwave ferrite circulator is a non-reciprocal microwave device that can realize one-way transmission of signals, generally three-port or four-port. The one-way circulation path is ①→②→③→①. When the signal is input through the ① port, it can only be output through the ② port after passing through the circulator. Similarly, when the signal is input through the ② (or ③) port, it can only be output through the ③ (or ①) port. Ferrite circulators play an important role in mobile communications because of their ring characteristics, and are widely used in transceiver systems in radar, telemetry and remote control, electronic countermeasures, and microwave measurement. [0003] With the rapid development of modern mobile communications, microwave ferrite circulators have broader...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01P1/387H01P11/00
Inventor 郑鹏郑辉郑梁邓江峡秦会斌钱杨伟赵文静
Owner HANGZHOU DIANZI UNIV