Thin film circulator with integrated microstrip and manufacturing method thereof
A circulator and microstrip technology, applied in waveguide-type devices, electrical components, circuits, etc., can solve problems such as reducing the integration of the circulator, reducing the operating bandwidth of the circulator, and affecting the circulator.
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Embodiment 1
[0023] In this embodiment, GaAs is used as the dielectric substrate; gold is used as the metal electrode; yttrium iron garnet ferrite is used as the ferromagnetic film.
[0024] Step 1, using pulsed laser deposition (PLD) technology to deposit a 2 micron thick gold film on the GaAs substrate; the deposition conditions are: the vacuum degree is 5 × 10-4Pa, the substrate temperature is room temperature, and the time is 1 hour
[0025] Step 2, using PLD technology to deposit a 50-micron thick yttrium-iron-garnet ferrite film on the gold film; the deposition conditions are: the vacuum degree is 1Pa, the substrate temperature is 700°C, and the time is 40 hours.
[0026] Step 3, annealing the ferrite film obtained in step 2 at 750° C. for 3 hours in an annealing furnace;
[0027] Step 4, continue to use the PLD technology to deposit a 2 micron thick gold film on the sample obtained in step 3; the deposition conditions are: the vacuum degree is 5×10-4Pa, the substrate temperature is ...
Embodiment 2
[0031] In this embodiment, MgO is used as the dielectric substrate; gold is used as the metal electrode; and yttrium iron garnet ferrite is used as the ferromagnetic film.
[0032] Step 1, using pulsed laser deposition (PLD) technology to deposit a 2 micron thick gold film on the MgO substrate; the deposition conditions are: the vacuum degree is 5 × 10-4Pa, the substrate temperature is room temperature, and the time is 1 hour
[0033] All the other steps are with embodiment 1
Embodiment 3
[0035] In this embodiment, GaAs is used as the dielectric substrate; gold is used as the metal electrode; nickel-zinc spinel ferrite is used as the ferromagnetic film.
[0036] Step 1, using pulsed laser deposition (PLD) technology to deposit a 2 micron thick gold film on the GaAs substrate; the deposition conditions are: the vacuum degree is 5 × 10-4Pa, the substrate temperature is room temperature, and the time is 1 hour
[0037] Step 2, using PLD technology to deposit a 70-micron-thick nickel-zinc spinel-type ferrite film on the gold film; the deposition conditions are: the vacuum degree is 1Pa, the substrate temperature is 700°C, and the time is 30 hours.
[0038] All the other steps are with embodiment 1
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