Temperature sensor and method for producing same

A technology of temperature sensor and thin-film thermistor, which is applied in thermometers, resistors with negative temperature coefficient, resistance manufacturing, etc., can solve the problems of unclear thermal reliability and no heat resistance of nitride-based materials, and achieve unevenness Less, high bondability, less flexibility effect

Active Publication Date: 2014-11-26
MITSUBISHI MATERIALS CORP
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

In addition, regarding the thermistor material, in the examples of Ta-Al-N-based materials, materials with a B constant of about 500 to 3000K can be obtained, but there is no description about heat resistance, and nitride-based materials Unclear thermal reliability

Method used

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  • Temperature sensor and method for producing same
  • Temperature sensor and method for producing same
  • Temperature sensor and method for producing same

Examples

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Embodiment

[0051] Next, for the temperature sensor and its manufacturing method involved in the present invention, refer to Figure 5 to Figure 13 The results of evaluation by the examples produced based on the above-mentioned embodiment will be specifically described.

[0052]

[0053] The resistance value change rate and the B constant change rate at the time of heat resistance test were investigated about the Example produced based on said embodiment. That is, the manufactured temperature sensor of the example was subjected to a heat resistance test at 125° C. for 1000 h in the air, and the electrical changes (resistance value change rate, B constant change rate) before and after the test were evaluated. In addition, for comparison, a temperature sensor using a bonding layer of Cr instead of TiN was also produced as a comparative example, and the above-mentioned evaluation was performed in the same manner.

[0054] As a result of this evaluation, it was found that the rate of chang...

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Abstract

Provided is a temperature sensor that: is not susceptible to an increase in resistance in an electrode structure with respect to a TiAlN thermistor material layer, even in a high-temperature environment; can be directly formed on a film, or the like, without baking; and is highly reliable due to having high heat resistance. Further provided is a method for producing the temperature sensor. The temperature sensor is provided with: an insulating substrate (2); a thin-film thermistor part (3) formed on top of the insulating substrate (2); and a pair of pattern electrodes(4) that has a pair of counter electrode parts (4a), which face each other, disposed on the thin-film thermistor part, and that is formed on the insulating substrate. The thin-film thermistor part is formed by a TiAlN thermistor material, and the pattern electrodes comprise a TiN joining layer (5) formed on the thin-film thermistor, and an electrode layer (6) formed by a precious metal on the joining layer.

Description

technical field [0001] The invention relates to a temperature sensor suitable for a film type thermistor temperature sensor and a manufacturing method thereof. Background technique [0002] For high precision and high sensitivity, a high B constant is required for thermistor materials used in temperature sensors and the like. Conventionally, such thermistor materials are usually transition metal oxides such as Mn, Co, and Fe (refer to Patent Documents 1 and 2). In addition, in order to obtain stable thermistor characteristics, these thermistor materials need to be fired at 600°C or higher. [0003] And, in addition to the thermistor material composed of the above metal oxide, for example, in Patent Document 3, it is proposed that the general formula: M x A y N z (Wherein, M represents at least one of Ta, Nb, Cr, Ti and Zr, A represents at least one of Al, Si and B. 0.1≤x≤0.8, 0<y≤0.6, 0.1≤z≤0.8 , x+y+z=1) Thermistor materials made of nitrides represented. In additio...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01K7/22H01C7/04H01C17/06H01C17/12
CPCH01C17/12H01C7/008H01C1/148H01C1/142H01C17/288G01K7/22G01K7/226C23F1/38
Inventor 长友宪昭稻叶均田中宽
Owner MITSUBISHI MATERIALS CORP
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