The invention relates to a
chip resistor preparation method based on magnetron
sputtering and low-temperature heat treatment. The
chip resistor preparation method comprises the following steps: respectively preparing a
surface electrode and a back
electrode on the front and back surfaces of a substrate; a resistance layer is sputtered on the front face of the substrate, the
sputtering power density is 0.05 W / mm < 2 >, the
sputtering time is 30 min to 2 h, the temperature of a target material is smaller than or equal to 200 DEG C during sputtering, and the temperature of the substrate is smaller than or equal to 180 DEG C; performing low-temperature heat treatment on the resistance layer under the protection of
inert gas, wherein the temperature of the low-temperature heat treatment is 350 + / -5 DEG C; after the resistance value of the resistive layer is adjusted through
laser cutting, a protective layer is prepared on the surface of the resistive layer; and preparing a side
surface electrode on the side surface of the substrate, so that the
surface electrode is electrically connected with the back
electrode. Through
temperature control of the target material and the substrate during sputtering, an optimized initial condition is provided for film growth, a film with a more ideal stress state and a more ideal
microstructure is formed, and through a subsequent low-temperature heat treatment process, a resistive layer is recovered to an
alloy phase and the
activation energy of a
manganese element is improved, so that the qualitative improvement of the film performance is cooperatively realized.