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Manufacture method of tungsten-titanium target material

A production method and technology of tungsten-titanium target materials, which are applied in the field of sputtering targets, can solve the problems of unreachable, wasteful, expensive raw materials of tungsten-titanium target materials, etc., achieve low pressure, improve utilization rate, and facilitate compactness effect

Inactive Publication Date: 2014-12-17
KONFOONG MATERIALS INTERNATIONAL CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the utilization rate of tungsten-titanium targets is often less than one-third, and tungsten-titanium targets are not recycled after being used once. In addition, the raw materials of tungsten-titanium targets are very expensive, resulting in great waste

Method used

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  • Manufacture method of tungsten-titanium target material
  • Manufacture method of tungsten-titanium target material

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Embodiment Construction

[0031] The technical solution of the present invention will be described clearly and completely through specific embodiments below in conjunction with the accompanying drawings. Apparently, the described embodiments are only a part of the possible implementation modes of the present invention, not all of them. According to these embodiments, all other implementation manners that can be obtained by those skilled in the art without creative efforts belong to the protection scope of the present invention.

[0032] figure 1 It is a schematic diagram of making a target in a specific embodiment of the present invention. figure 2 It is the production flow chart of the target material of the specific embodiment of the present invention. combine figure 1 and figure 2 , the manufacturing method of the target comprises the following steps:

[0033] implement figure 2 Step S1 in : Mechanically crushing the discarded target material to form particles 10, the discarded target materi...

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Abstract

The invention provides a manufacture method of a tungsten-titanium target material. The manufacture method includes the steps: mechanically crushing a waste target material, to form particles, wherein the waste target material is a tungsten-titanium target material; providing a powder raw material for manufacturing the target material; after mixing the particles and the powder raw material, putting into a mold, carrying out hot pressing sintering, and forming a target material; and after hot pressing sintering, cooling, and taking out the target material. The manufacture method of the target material can greatly improve the utilization rate of the target material, so as to avoid the waste of materials of the target material and save costs. In addition, compared with a process of directly carrying out hot pressing sintering on the waste target material and the powder raw material, the hot pressing sintering process has low temperature and low pressure intensity when the waste target material is recycled, and thus process costs can be further saved.

Description

technical field [0001] The invention belongs to the field of sputtering targets, in particular to a method for manufacturing a tungsten-titanium target. Background technique [0002] Since the 1990s, the simultaneous development of targets and sputtering technology has greatly met the development needs of various new electronic devices. etc. have been widely used. However, the sputtering life of the existing target is limited, the utilization rate is not high, and the target is not recycled after being used once, resulting in great waste. For example, tungsten-titanium (W / Ti) alloy has been successfully applied to the diffusion barrier layer of Al, Cu and Ag wiring due to its low resistivity, good thermal stability and oxidation resistance. Therefore, tungsten-titanium target has become It is one of the research hotspots of the target. However, the utilization rate of tungsten-titanium targets is often less than one-third, and tungsten-titanium targets are not recycled af...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/34C23C14/14
Inventor 姚力军相原俊夫大岩一彦潘杰王学泽宋佳
Owner KONFOONG MATERIALS INTERNATIONAL CO LTD
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