Manufacture method of tungsten-titanium target material
A production method and technology of tungsten-titanium target materials, which are applied in the field of sputtering targets, can solve the problems of unreachable, wasteful, expensive raw materials of tungsten-titanium target materials, etc., achieve low pressure, improve utilization rate, and facilitate compactness effect
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[0031] The technical solution of the present invention will be described clearly and completely through specific embodiments below in conjunction with the accompanying drawings. Apparently, the described embodiments are only a part of the possible implementation modes of the present invention, not all of them. According to these embodiments, all other implementation manners that can be obtained by those skilled in the art without creative efforts belong to the protection scope of the present invention.
[0032] figure 1 It is a schematic diagram of making a target in a specific embodiment of the present invention. figure 2 It is the production flow chart of the target material of the specific embodiment of the present invention. combine figure 1 and figure 2 , the manufacturing method of the target comprises the following steps:
[0033] implement figure 2 Step S1 in : Mechanically crushing the discarded target material to form particles 10, the discarded target materi...
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