Front end input waveguide structure of direction coupling optical waveguide detector

Abstract

The invention belongs to the field of photoelectric technology and discloses a front end input waveguide structure of a directional coupling optical waveguide detector. The front end input waveguide structure of the directional coupling optical waveguide detector comprises a substrate layer, a covering layer, a lower waveguide layer, a gap layer, an upper waveguide layer and an absorption layer which are sequentially stacked from bottom to top. The front end face of the substrate layer, the front end face of the covering layer, the front end face of the lower waveguide layer, the front end face of the gap layer and the front end face of the upper waveguide layer are flush with one another, the absorption layer is located on the upper surface of the rear of the upper waveguide layer, the gap layer is a coupling layer, and the distance from the front end face of the absorption layer to the front end face of the upper waveguide layer is twice of the coupling length. The front end input waveguide structure overcomes the defects of a waveguide detector and a horizontal direction coupling waveguide detector, light current can be effectively increased, and the problem that the front end of a waveguide is overheated and burnt because of the pattern evolution problem is solved.

Description

technical field [0001] The invention belongs to the field of optoelectronic technology, and relates to a waveguide photodiode, in particular to a front-end input waveguide structure of a directional coupling optical waveguide detector. Background technique [0002] The high-power high-speed photodetector is a detection device based on the interaction between light and matter, and its function is to convert the incident light signal into a high-power high-frequency signal. High-power high-speed optical detector is an indispensable device in optically controlled phased array radar, ultra-high-speed test system and optical fiber LAN communication, and its performance plays a decisive role in the whole system. [0003] Conventional vertical-incidence photodetectors cannot meet both high-speed and high-power requirements. The main reasons are as follows: one is the saturation effect, which limits the photocurrent; the other is the long transit time, which limits the response fre...

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Problems solved by technology

[0007] The existing problems of waveguide detectors are: the distribution of photocurrent along the waveguide is uneven, it is exponentially attenuated, and the coupling loss is large; the photocurrent is very strong at the front end of the waveguide, and gradually weakens in the direction of propagation, and the front end of the waveguide determines the photocurrent. saturation value, which limits the incident optical power

[0008] In 2008, in order to solve the problem of uneven photocurrent distribution and large coupling loss of waveguide

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