Polarized light irradiation device for photo-alignment and polarized-light irradiation method for photo-alignment

A technology of irradiation device and polarized light, which is applied in the direction of measuring the polarization of light, exposure device of photo-plate making process, measuring device, etc. It can solve the problems of deterioration of measurement accuracy and achieve the effect of high optical orientation processing and high detection accuracy

Active Publication Date: 2016-10-26
USHIO DENKI KK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

In Patent Document 3, since the analyzer is not rotated, it is not affected by the accuracy of the rotation stop of the analyzer, but if the accuracy of the attitude of the origin of rotation of the analyzer is poor, the measurement accuracy will be deteriorated

Method used

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  • Polarized light irradiation device for photo-alignment and polarized-light irradiation method for photo-alignment
  • Polarized light irradiation device for photo-alignment and polarized-light irradiation method for photo-alignment
  • Polarized light irradiation device for photo-alignment and polarized-light irradiation method for photo-alignment

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Embodiment Construction

[0088]Next, an aspect (hereinafter, embodiment) for carrying out the invention of the present application will be described.

[0089] figure 1 It is a perspective schematic diagram of the polarized light irradiation apparatus for photo-alignment which concerns on 1st Embodiment of this invention. figure 1 The illustrated polarized light irradiation device is a device for performing photo-alignment treatment on a plate-shaped workpiece W such as a liquid crystal substrate with a film, and includes a light irradiator 1 for irradiating the workpiece W with polarized light.

[0090] In this embodiment, the workpiece W has a rectangular shape. As described above, in light alignment, the deflection axis of polarized light needs to be oriented in the direction to be aligned with high precision. The orientation direction can be set arbitrarily, and is hereinafter referred to as setting the orientation direction. The set orientation direction is set based on the direction in which a...

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Abstract

The invention provides a polarized light irradiation apparatus and method for photo-alignment, which is capable of detecting the direction of a polarization axis of irradiated polarized light in high precision and performing photo-alignment treatment in high quality in the aspect of direction precision. A workpiece (W) is arranged on an irradiation surface (R). When the workpiece (W) is irradiated by the polarized light by virtue of irradiating the irradiation surface (R) through a polarized element (121), a polarization direction detector (40) is arranged on the irradiation surface (R) and detects the direction of the polarization axis of the polarized light. A polarization analyzer arranged in the polarization direction detector (40) is located in advance by a polarization analyzer calibrator, and a rotary original point is at a specified angle with respect to the reference direction of the apparatus. Based on the polarization direction detected by the polarization direction detector (40), the deviation of the polarization axis can be obtained and by using a polarized element adjusting mechanism (7) to adjust the posture of the polarized element (121), the deviation can be eliminated.

Description

technical field [0001] The invention of the present application relates to a technique for irradiating polarized light when performing photo-alignment. Background technique [0002] In recent years, when obtaining the alignment film for liquid crystal display elements and the alignment layer for viewing angle compensation films, the technique called photo-alignment which aligns by light irradiation is used gradually. Hereinafter, films and layers aligned by light irradiation are collectively referred to as photo-alignment films. In addition, "orientation" or "orientation processing" means giving directionality to some property of an object. [0003] Photo-alignment is performed by irradiating polarized light to the film for photo-alignment films (henceforth film material). The film material is made of resin such as polyimide, and polarized light polarized in a desired direction is irradiated to the film material. By irradiating polarized light of predetermined wavelength,...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01J4/00G02F1/1337
CPCG02F1/13G02F1/1337G03F7/20G03F9/00
Inventor 木村淳治
Owner USHIO DENKI KK
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