MEMS weapon security apparatus
A security and weapon technology, applied in the fuze field, can solve the problems of difficult integration and large volume of traditional fuzes, and achieve the effects of improving adaptability, high intelligence, and low cost
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[0025] The present invention will be further described below in conjunction with the accompanying drawings.
[0026] refer to figure 1 , a MEMS weapon security device, including a single crystal silicon substrate 1, a silicon dioxide insulating layer 2 and a single crystal silicon structure layer 3, the thickness of the single crystal silicon substrate 1 is 400-500um, and a diameter of 300um is made on it. The circular acceleration bore 5 of ~400um, the thickness of the silicon dioxide insulating layer 2 is 2 ~ 3um, the thickness of the monocrystalline silicon structure layer 3 is 50 ~ 100um, and the bayonet mechanism I, The ratchet mechanism II and the partition mechanism III, wherein the movable bayonet 10 in the bayonet mechanism I, the ratchet 20 in the ratchet mechanism II and the explosion-proof partition plate 30 in the partition mechanism III are engaged through the tooth structure.
[0027] In the bayonet mechanism I, the first electrode 13a and the second electrode ...
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