Automatic feeding device of horizontal diffusion furnace
An automatic feeding and diffusion furnace technology, applied in diffusion/doping, furnace, furnace components, etc., can solve the requirements of the development of semiconductor and solar energy industries, increase the amount of process gas injection, and purify the secondary pollution of the working area, etc. problem, to eliminate the shadow effect, reduce secondary pollution, and improve the cleaning interval.
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[0030] The specific embodiment of the present invention will be further described in detail below in conjunction with the accompanying drawings.
[0031] It should be noted that, in the following specific embodiments, when describing the embodiments of the present invention in detail, in order to clearly show the structure of the present invention for the convenience of description, the structures in the drawings are not drawn according to the general scale, and are drawn Partial magnification, deformation and simplification are included, therefore, it should be avoided to be interpreted as a limitation of the present invention.
[0032] In the following specific implementation, please refer to image 3 , image 3 It is a structural schematic diagram of an automatic feeding device for a horizontal diffusion furnace of the present invention. like image 3 Shown, automatic feeding device of the present invention, and figure 1 The automatic feeding system of the shown existi...
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