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Free-form surface morphology three-dimensional measurement method and device

A three-dimensional measurement and curved surface technology, applied in the direction of measuring devices, optical devices, instruments, etc., can solve the problems of low zero-order spectrum energy utilization, frequency filling, etc., and achieve convenient image field correction, reduce wave aberration, and high contrast Effect

Active Publication Date: 2015-02-25
FLIGHT AUTOMATIC CONTROL RES INST
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Problems solved by technology

[0004] The purpose of the present invention is to provide an on-line non-contact grating for the production problems of controlling the rectangular grating, frequency filling, low energy utilization rate of the zero-order spectrum, general lens selection, and limited measurement field of view in the prior art. Freeform Surface Profile Measuring Device

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Embodiment Construction

[0020] The present invention will be further described below in conjunction with embodiment:

[0021] Please also see figure 1 and figure 2 The three-dimensional measurement device for free-form surface profile of the present invention includes a laser 1, a beam shaping system 2, a rectangular grating 3, a monochromatic Fourier transform lens 4, a spectrum selector 5, a wave plate 6, a monochromatic variable magnification lens 7, and a precision screw. 81. Precision guide rail 1 82, total reflection mirror 1 91, total reflection mirror 2 92, precision lead screw 2 83, precision guide rail 2 84, free-form surface to be tested 10, high-speed high-definition camera 11, computer and software processing system 12, machine tool platform Main shaft 13, gantry cantilever beam 14.

[0022] Among them, the beam shaping system is located behind the laser, which expands, collimates, and shapes the laser beam; the rectangular grating is located behind the beam shaping system, and positi...

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Abstract

The invention belongs to free-form surface morphology measurement technologies and particularly relates to a free-form surface morphology three-dimensional measurement method and device. The free-form surface morphology three-dimensional measurement device comprises a laser, a beam shaping system, a rectangular raster, a monochromatic Fourier transform lens, a wave plate and spectrum selector, a monochrome convertible lens, two holophotes, a free-form surface to be detected, a high-speed and high-definition camera, two precision lead screw sets, two precision guide rail sets, a machine tool platform main shaft and a gantry suspension beam. According to the method and device, sinusoidal intensity targets are generated by the utilization of a space optics Fourier analysis method for outputting and are projected on the free-form surface to be detected, and the three-dimensional morphology measurement is carried out; dynamic online measurement of three-dimensional surfaces of various free-form surfaces including spheres, ellipsoids, hyperboloids and paraboloids is convenient; milling, fine grinding, rough polishing and elaborate polishing of optical surfaces are convenient; secondary clamping is not needed during dynamic online detection of all technological processes.

Description

technical field [0001] The invention belongs to free-form surface profile measurement technology, in particular to a free-form surface profile measurement method and device. Background technique [0002] The measurement methods of various free-form surfaces, including spheres, ellipsoids, hyperboloids, and paraboloids, are generally measured with a three-dimensional profiler; the detection of optical surfaces in the stages of milling, fine grinding, and rough polishing affects the shape of aspheric surfaces. Critical stage for convergence accuracy and speed. At this time, the surface shape error has not yet reached the light wavelength level, and the surface roughness is not good. There are certain difficulties in the usual interference detection method. Therefore, a contact three-dimensional profiler is also used. However, in the fine polishing stage, an interferometer is generally used. In some cases, it is still necessary to rely on special equipment to process special ...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/24
Inventor 任旭升李县洛腾霖陈勇
Owner FLIGHT AUTOMATIC CONTROL RES INST
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