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Air micro-flowmeter based on diamagnetic levitation mechanism

A technology of micro-flowmeter and magnetic levitation, which is applied in the detection device of trace gas flow and the field of gas micro-flowmeter, which can solve the problems that the resolution of gas flowmeter is not fine enough and cannot detect micro-flow, so as to save maintenance and reduce The effect of friction loss

Active Publication Date: 2015-03-11
ZHENGZHOU UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The purpose of the present invention is to provide a gas micro-flowmeter based on the anti-magnetic levitation mechanism. The present invention adopts the anti-magnetic levitation mechanism to reduce the motion damping of the detection parts and improve the detection accuracy, so as to solve the problem that the resolution of the gas flow meter in the prior art is not fine enough , leading to technical problems that cannot detect tiny flows

Method used

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  • Air micro-flowmeter based on diamagnetic levitation mechanism
  • Air micro-flowmeter based on diamagnetic levitation mechanism
  • Air micro-flowmeter based on diamagnetic levitation mechanism

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Embodiment 1

[0023] like figure 1 and figure 2 As shown, the gas micro flow meter based on the anti-magnetic levitation mechanism in this embodiment includes a housing 1, an anti-magnetic levitation part is provided inside the housing, a cover plate 2 is provided on the upper end of the housing, and a detection device is provided on the cover plate; The magnetic levitation part includes a permanent magnet assembly and a highly oriented pyrolytic graphite rotor 3, the highly oriented pyrolytic graphite rotor is suspended directly above the permanent magnet assembly, the permanent magnet assembly is composed of NdFeB permanent magnets, and the permanent magnet assembly includes an inner magnet 4 And an outer ring magnet 5, described inner magnet is cylindrical magnet, and the diameter of described cylindrical magnet is 1.5875mm, height is 1.5875mm; The outer diameter of described outer ring magnet is 3.175mm, inner diameter is 1.5875mm, height 1.5875mm, the outer ring magnet is sleeved on...

Embodiment 2

[0028] The gas micro flow meter based on the anti-magnetic levitation mechanism in this embodiment includes a housing, an anti-magnetic levitation part is arranged inside the shell, a cover plate is provided on the upper end of the shell, and a detection device is provided on the cover plate; the anti-magnetic levitation part includes a permanent magnet Components and highly oriented pyrolytic graphite rotor, the highly oriented pyrolytic graphite rotor is suspended directly above the permanent magnet assembly, the permanent magnet assembly is composed of NdFeB permanent magnets, and the permanent magnet assembly includes an inner magnet and an outer ring magnet, so The inner magnet is a cylindrical magnet, the diameter of the cylindrical magnet is 1.5875mm, and the height is 1.5875mm; the outer diameter of the outer ring magnet is 3.175mm, the inner diameter is 1.5875mm, and the height is 1.5875mm. Sleeved on the outer circumference of the inner magnet, the magnetization direc...

Embodiment 3

[0033] The gas micro flow meter based on the anti-magnetic levitation mechanism in this embodiment includes a housing, an anti-magnetic levitation part is arranged inside the shell, a cover plate is provided on the upper end of the shell, and a detection device is provided on the cover plate; the anti-magnetic levitation part includes a permanent magnet Components and highly oriented pyrolytic graphite rotor, the highly oriented pyrolytic graphite rotor is suspended directly above the permanent magnet assembly, the permanent magnet assembly is composed of NdFeB permanent magnets, and the permanent magnet assembly includes an inner magnet and an outer ring magnet, so The inner magnet is a cylindrical magnet, the diameter of the cylindrical magnet is 1.5875mm, and the height is 1.5875mm; the outer diameter of the outer ring magnet is 3.175mm, the inner diameter is 1.5875mm, and the height is 1.5875mm. Sleeved on the outer circumference of the inner magnet, the magnetization direc...

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Abstract

The invention discloses an air micro-flowmeter based on diamagnetic levitation mechanism. The air micro-flowmeter comprises a shell; a diamagnetic levitation part is arranged inside the shell; a cover plate is arranged at the upper end of the shell; a detecting device is arranged on the cover plate; the diamagnetic levitation part comprises a permanent magnet component and a high-directionality pyrolytic graphite rotor; the high-directionality pyrolytic graphite rotor is levitated over the permanent magnet component; the permanent magnet component is composed of neodymium iron boron or samarium cobalt permanent magnets; the detecting device comprises a sensor and a processing module; the sensor is arranged over the high-directionality pyrolytic graphite rotor and used for sending a signal to the processing module; the shell is cylindrical; an air charging hole and an air discharging hole are formed in the sidewall of the shell; the air charging hole and the high-directionality pyrolytic graphite rotor are arranged on the same horizontal plane. As the high-directionality pyrolytic graphite rotor is in a levitated state, the air micro-flowmeter disclosed by the invention is quite small in rotation resistance and can be used for detecting quite small air flow.

Description

technical field [0001] The invention relates to the field of sensing and metering devices, in particular to a detection device for trace gas flow, in particular to a gas micro flow meter based on an anti-magnetic levitation mechanism. Background technique [0002] The current flowmeter is mainly divided into ultrasonic type and electromagnetic type. The principle of ultrasonic flowmeter is to use the principle that the propagation speed of ultrasonic waves changes with the change of flow velocity to measure the flow rate of gas. Electromagnetic flowmeter is mainly used to measure the flow velocity of conductive liquid. The measurement principle of electromagnetic flowmeter is based on Faraday's law of electromagnetic induction. Proportional. For gas flow meters, metal balls are also used to detect gas flow. However, the resolution of current gas flowmeters is not fine enough, which leads to the inability to accurately detect the tiny flow, especially the flow when some pip...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01F1/56
Inventor 苏宇锋叶志通段智勇赵江铭杨杰伟
Owner ZHENGZHOU UNIV
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