Fe-Pt-based sputtering target having non-magnetic substance dispersed therein

Abstract

A sintered body sputtering target which comprises an alloy having a chemical composition comprising Pt at a molecular population ratio of 35 to 55% and a remainder made up by Fe and a non-magnetic substance dispersed in the alloy, said sintered body sputtering target being characterized in that at least SiO2 is contained as the non-magnetic substance, the SiO2 is amorphous, and the residual oxygen amount, which is determined by subtracting the amount of oxygen contained as a component of the non-magnetic substance from the total amount of oxygen contained in the target, is 0.07 wt% or less. The present invention addresses the problem of providing a sintered body sputtering target which has such a structure that a non-magnetic substance comprising SiO2 is dispersed in a Fe-Pt-based alloy, and in which the crystallization of SiO2 into cristobalite can be avoided and particles are produced in a reduced amount during sputtering.

Description

technical field

[0001] The invention relates to a sputtering target used for the formation of a granular magnetic thin film in a magnetic recording medium, and to a 2 A sintered sputtering target with non-magnetic substances dispersed in Fe-Pt-based alloys. Background technique

[0002] In the field of magnetic recording represented by hard disk drives, materials based on Co, Fe, or Ni, which are ferromagnetic metals, are used as materials for magnetic thin films in magnetic recording media. For example, a Co-Cr-based or Co-Cr-Pt-based ferromagnetic alloy containing Co as a main component is used as a magnetic thin film of a hard disk drive employing an in-plane magnetic recording method.

[0003] In addition, the magnetic thin film of the hard disk drive adopting the perpendicular magnetic recording system put into practical use in recent years often uses a composite material containing a Co—Cr—Pt-based ferromagnetic alloy mainly composed of Co and a nonmagnetic substance....

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