Fe-Pt-based sputtering target having non-magnetic substance dispersed therein

A sputtering target and non-magnetic technology, which is applied in the field of sputtering targets, can solve problems such as inability to completely suppress crystallization, and achieve the effect of improving yield

Active Publication Date: 2015-03-11
JX NIPPON MINING & METALS CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0010] However, there are problems as follows: using SiO 2 When the target dispersed in the Fe-Pt alloy is sputtered, the SiO in the target 2 The microcracks generated on the surface become the cause of powder particles
However, in the presence of SiO 2 In the manufacture of sputtering targets made of non-magnetic materials and Fe-Pt-based alloys, there is a problem that SiO cannot be completely suppressed even under the conditions of Patent Document 6. 2 Crystallization to cristobalite

Method used

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  • Fe-Pt-based sputtering target having non-magnetic substance dispersed therein
  • Fe-Pt-based sputtering target having non-magnetic substance dispersed therein

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0053] Fe powder with an average particle size of 3 μm, Pt powder with an average particle size of 3 μm, and amorphous SiO with an average particle size of 1 μm were prepared as raw material powders. 2 powder.

[0054] These powders were weighed in the following molecular ratio so that the total weight was 2050 g, SiO 2 The volume ratio is about 39%.

[0055] Molecular ratio: 84(50Fe-50Pt)-16SiO 2

[0056] Next, the weighed powder and zirconia balls as a pulverization medium were enclosed in a 10-liter ball mill pot using Ar gas, and were rotated and mixed for 4 hours. Under the conditions of a hydrogen atmosphere, a heating rate of 300° C. / hour, a holding temperature of 800° C., and a holding time of 2 hours, the mixed powder taken out from the ball mill was subjected to reduction heat treatment. After the reduction heat treatment, it was naturally cooled to room temperature, and the mixed powder was filled into a carbon mold and hot-pressed.

[0057] The hot-pressing co...

Embodiment 2

[0086] Fe powder with an average particle size of 3 μm, Pt powder with an average particle size of 3 μm, Cu powder with an average particle size of 5 μm, and amorphous SiO with an average particle size of 1 μm were prepared as raw material powders. 2 powder.

[0087] These powders were weighed in the following molecular ratio so that the total weight was 1800 g, SiO 2 The volume ratio is about 46%.

[0088] Molecular ratio: 80(45Fe-45Pt-10Cu)-20SiO 2

[0089] Next, the weighed powder and zirconia balls as a pulverization medium were enclosed in a ball mill pot with a capacity of 10 liters using Ar gas, and were rotated and mixed for 4 hours. Under the conditions of a hydrogen atmosphere, a heating rate of 300° C. / hour, a holding temperature of 800° C., and a holding time of 2 hours, the mixed powder taken out from the ball mill was subjected to reduction heat treatment. After the reduction heat treatment, it was naturally cooled to room temperature, and the mixed powder wa...

Embodiment 3

[0119] Fe powder with an average particle size of 3 μm, Pt powder with an average particle size of 3 μm, C powder with an average particle size of 10 μm, and amorphous SiO with an average particle size of 1 μm were prepared as raw material powders. 2 powder.

[0120] These powders were weighed in the following molecular ratios so that the total weight was 2200 g, C and SiO 2 The total volume ratio is about 33%.

[0121] Molecular ratio: 80(50Fe-50Pt)-10SiO 2 -10C

[0122] Next, the weighed powder and zirconia balls as a pulverization medium were enclosed in a 10-liter ball mill pot using Ar gas, and were rotated and mixed for 4 hours. Under the conditions of a hydrogen atmosphere, a heating rate of 300° C. / hour, a holding temperature of 800° C., and a holding time of 2 hours, the mixed powder taken out from the ball mill was subjected to reduction heat treatment. After the reduction heat treatment, it was naturally cooled to room temperature, and the mixed powder was fille...

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Abstract

A sintered body sputtering target which comprises an alloy having a chemical composition comprising Pt at a molecular population ratio of 35 to 55% and a remainder made up by Fe and a non-magnetic substance dispersed in the alloy, said sintered body sputtering target being characterized in that at least SiO2 is contained as the non-magnetic substance, the SiO2 is amorphous, and the residual oxygen amount, which is determined by subtracting the amount of oxygen contained as a component of the non-magnetic substance from the total amount of oxygen contained in the target, is 0.07 wt% or less. The present invention addresses the problem of providing a sintered body sputtering target which has such a structure that a non-magnetic substance comprising SiO2 is dispersed in a Fe-Pt-based alloy, and in which the crystallization of SiO2 into cristobalite can be avoided and particles are produced in a reduced amount during sputtering.

Description

technical field [0001] The invention relates to a sputtering target used for the formation of a granular magnetic thin film in a magnetic recording medium, and to a 2 A sintered sputtering target with non-magnetic substances dispersed in Fe-Pt-based alloys. Background technique [0002] In the field of magnetic recording represented by hard disk drives, materials based on Co, Fe, or Ni, which are ferromagnetic metals, are used as materials for magnetic thin films in magnetic recording media. For example, a Co-Cr-based or Co-Cr-Pt-based ferromagnetic alloy containing Co as a main component is used as a magnetic thin film of a hard disk drive employing an in-plane magnetic recording method. [0003] In addition, the magnetic thin film of the hard disk drive adopting the perpendicular magnetic recording system put into practical use in recent years often uses a composite material containing a Co—Cr—Pt-based ferromagnetic alloy mainly composed of Co and a nonmagnetic substance....

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/34G11B5/851
CPCG11B5/851C22C33/0228C23C14/3414C23C14/3407H01J37/3426C23C14/165H01J37/3429C23C14/14H01J2237/332
Inventor 佐藤敦
Owner JX NIPPON MINING & METALS CORP
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