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Adhesive films and surface protection films for chemical polishing

A surface protection film, chemical grinding technology, applied in the direction of adhesives, adhesive types, ester copolymer adhesives, etc.

Active Publication Date: 2017-05-24
FUJIMORI KOGYO CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the conventional hydrofluoric acid-resistant protective sheet has the following problem: although the immersion of hydrofluoric acid is prevented, after the hydrofluoric acid-resistant protective sheet is peeled off, the so-called adhesive residue (adhesive residue) that contaminates the panel surface occurs. )The problem

Method used

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  • Adhesive films and surface protection films for chemical polishing
  • Adhesive films and surface protection films for chemical polishing
  • Adhesive films and surface protection films for chemical polishing

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0057]In a reaction apparatus equipped with a stirrer, a thermometer, a reflux condenser, and a nitrogen introduction pipe, nitrogen gas was introduced to replace the air in the reaction apparatus with nitrogen. Then, 95 parts by weight of 2-ethylhexyl acrylate, 5 parts by weight of 6-hydroxyhexyl acrylate, and 100 parts by weight of a solvent (ethyl acetate) were added to the reaction device. Then, 0.1 part by weight of azobisisobutyronitrile as a polymerization initiator was dropped over 2 hours, and reacted at a temperature of 65° C. for 8 hours to obtain the acrylic copolymer solution 1 of Example 1 having a weight average molecular weight of 500,000.

Embodiment 2～6 and comparative example 1～3

[0059] Except that the composition of each monomer was set as shown in (A), (B-1) and (B-2) of Table 1, it was the same as the acrylic copolymer solution 1 used in the above-mentioned Example 1. The operation was performed to obtain acrylic copolymer solutions used in Examples 2-6 and Comparative Examples 1-3.

[0060]

[0061] Next, in the description of Examples and Comparative Examples, the effects of the present invention when the adhesive film of the present invention is used for a protective film for chemical polishing are described in comparison. Therefore, the term "adhesive film" used in the description of Examples and Comparative Examples may be replaced with "surface protection film for chemical polishing".

[0062] [Example 1]

[0063] For the acrylic copolymer solution 1 (wherein, the acrylic copolymer is 100 parts by weight) manufactured as above, 3.0 parts by weight of Coronate HL (trade name) was added as a crosslinking agent and KBE-403 (3- Glycidoxypropyl...

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Abstract

The invention provides a bonding film which prevents etching liquid penetration and prevents residual adhesive on a bonded member, and a surface protecting film for chemical grinding through utilizing the bonding film. The surface protecting film for chemical grinding, which is provided with an adhesive layer on a single surface of the a resin film substrate, is characterized in that the thickness of the resin film substrate is above 75 mu m; the adhesive layer is formed by acrylate adhesive composition which comprises a silane coupling agent and a crosslinking agent; and after the surface protecting film for chemical grinding is dipped in a hydrofluoric acid solution with a concentration of 15% at a temperature of 27 DEG C on condition that the adhesive layer abuts against a glass substrate, a part which is on a bonded surface of the glass substrate of a bonded member and is separated from the end of an abutting surface of the surface protecting film for chemical grinding for 80 mu m is protected from penetration of hydrofluoric acid for a period long than 150 seconds.

Description

technical field [0001] The present invention relates to an adhesive film and a surface protection film for chemical polishing. More specifically, the present invention provides a surface protection film for chemical polishing as a surface protection film used in a chemical polishing process of a glass substrate, and an adhesive film used for the surface protection film for chemical polishing. The surface protection film can be used to protect the adherend from chemical polishing by attaching it to the ITO surface for the touch panel sensor or the surface opposite to it formed on the glass substrate used as the adherend The influence of liquid (etching liquid). Background technique [0002] Conventionally, there is known a method of attaching a surface protective film to one surface of a glass substrate or the like for the purpose of thinning a glass substrate or the like, and then chemically polishing the other surface using an etching solution (for example, refer to Patent...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C09J7/02C09J133/08C09J11/06
CPCC09J7/385C09J9/00
Inventor 长仓毅岛口龙介长谷川良
Owner FUJIMORI KOGYO CO LTD