A vapor deposition machine for reducing au consumption of LED electrodes

Abstract

The invention provides an evaporator capable of reducing consumption of Au of an LED electrode. The evaporator comprises a support seat, an electronic gun, a heating lamp seat, a front-mounted plating pot and a rotating motor, wherein the electronic gun is installed at the lower end of the support seat, a magnetic conductive plate is installed above the electronic gun, a tungsten lined pot is arranged at the upper side of the electronic gun, a crucible curtain board is installed at the upper side of the tungsten lined pot, two sides of the upper part of the crucible curtain board are provided with the heating lamp seat, the front-mounted plating pot is installed at the upper side of the heating lamp seat, a plating pot front-mounted carrier plate is arranged on the front-mounted plating pot, the front-mounted plating pot is installed on a guide rail supporting column through a guide rail, the upper end of the guide rail is connected with the rotating motor, the rear side of the support seat is provided with a pneumatic valve, the upper side of the pneumatic valve is provided with a main valve air cylinder, and the lower side of the pneumatic valve is provided with a cold pump. By adopting an electron beam Lorentz force enhanced technology and improving the electronic gun (adding the magnetic conductive plate), the distribution of a magnetic field of the evaporator electronic gun is controlled, so that the electron beams can be more concentrated, the evaporation power is reduced, the gold consumption is reduced, and the evaporation black spots can be reduced.

Description

technical field [0001] The invention relates to the technical field of LED electrode production and manufacturing, in particular to an evaporation machine for reducing Au consumption of LED electrodes. Background technique [0002] Au is mainly used to prepare electrodes in the LED chip process, which is completed by metal evaporation. Metal evaporation is through the energy exchange between the high-energy electron beam and the evaporation source, so that the relatively stable metal atoms move and finally attach to the surface of the LED chip. The metal evaporation process will be divided into two stages: "metal pre-melting" and "effective coating". [0003] Au is an indispensable material in the manufacture of LED chip electrodes, with an average consumption of about 50g per furnace. Due to its high price, it accounts for half of the cost of LED chips. At the same time, electrode black spots often appear during electrode evaporation, which directly affects the appearance...

AI Technical Summary

Problems solved by technology

At the same time, electrode black spots often appear during electrode evaporation, which directly affects the appearance and grade of the product, resulting in up to 30% of the products that cannot be transmitted normally, mainly due to impurities introduced from around the evaporation source during the evaporation process

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