Liquid filling system for anti-fouling film coating

An antifouling and liquid medicine technology, which is applied in sputtering plating, ion implantation plating, vacuum evaporation plating, etc. It can avoid problems such as unstable temperature, and achieve the effect of eliminating frequent maintenance, improving equipment utilization rate, and eliminating costs.

Active Publication Date: 2015-04-08
OPTORUN SHANGHAI CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, it has the following inconveniences: a, it is inconvenient to adjust the setting of each dosing, and with the consumption of the medicine bottle, the precision of the medicine drop controlled by the pressure difference is easy to change; b, in the high vacuum transition st

Method used

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  • Liquid filling system for anti-fouling film coating
  • Liquid filling system for anti-fouling film coating
  • Liquid filling system for anti-fouling film coating

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0017] Embodiment one: if figure 1 As shown, the liquid feeding system for anti-fouling film coating in this embodiment is used to fill the liquid medicine in the liquid medicine bottle 5 of the anti-fouling film material into the crucible 9 for containing the liquid medicine during vacuum coating. The liquid addition system includes a liquid addition controller 2 and a set of liquid addition devices composed of a volumetric metering valve 3 and a medicine drop valve 7 . The liquid adding device has an infusion line, a pneumatic line and a control line, wherein the infusion line refers to the pipeline for transmitting the coating liquid, and the pneumatic line is the gas movement path in the system. These gases are the driving force of the liquid medicine, and the control line is Refers to the circuit that controls the opening and closing of valve components.

[0018] Infusion line: the liquid medicine inlet 4 of the volumetric metering valve 3 and the liquid medicine bottle ...

Embodiment 2

[0029] Embodiment 2: The difference between this embodiment and Embodiment 1 is that the liquid addition system includes a liquid addition controller 2 and two sets of liquid addition devices composed of a volumetric metering valve 3 and a medicine drop valve 7, that is, through a A set of liquid addition controller 2 (may include the host industrial computer 1) controls two sets of liquid addition devices, and the volumetric metering valve 3 in each liquid addition device is connected in parallel with the antifouling membrane material liquid bottle 5, namely The coating liquid can be extracted from the same antifouling film material liquid bottle 5 respectively. The connection mode, control mode and working mode of the remaining components in each liquid adding device are the same as those in Embodiment 1, and will not be repeated one by one.

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PUM

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Abstract

The invention relates to the field of vacuum film coating, especially relates to a liquid filling system for anti-fouling film coating and particularly relates to a device suitable for accurately measuring and filling a liquid-state material. The liquid filling system is characterized by at least comprising one dosing device, wherein the dosing device is composed of a dosing controller, a displacement metering valve and a dripping valve; the chemical liquid inlet of the displacement metering valve is communicated with an anti-fouling film material chemical liquid bottle; the chemical liquid outlet of the displacement metering valve is communicated with the dripping valve; the dripping opening of the dripping valve is connected into a crucible; the dosing controller is connected with the displacement metering valve and the dripping valve and used for controlling the displacement metering valve and the dripping valve respectively. The liquid filling system disclosed by the invention has the advantage that automatic vacuum dosing without the need of opening a cavity and breaking a vacuum can be carried out.

Description

technical field [0001] The invention relates to the field of vacuum coating, in particular to a liquid filling system for antifouling film coating, especially a device suitable for accurately measuring and filling liquid materials. Background technique [0002] Antifouling films have been used in various optoelectronic components such as touch screens and lenses. In particular, with the development of information technology, the market demand for touch screen products has grown rapidly in recent years. In order to increase the anti-fouling effect of various optoelectronic products mainly including touch screens, it has become an indispensable process to plate anti-fouling films on their surfaces. [0003] At present, the antifouling film is generally coated by vacuum evaporation method. In response to the surge in market demand, it has become increasingly important to develop continuous antifouling film coating equipment with a high degree of automation and uninterrupted p...

Claims

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Application Information

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IPC IPC(8): C23C14/56C23C14/54
CPCC23C14/246
Inventor 张洪史俊俊张海熬
Owner OPTORUN SHANGHAI CO LTD
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