Athermal arrayed-waveguide-grating wavelength division multiplexer and manufacturing method thereof

Abstract

The invention discloses an athermal arrayed-waveguide-grating wavelength division multiplexer and a manufacturing method thereof. The athermal arrayed-waveguide-grating wavelength division multiplexer comprises an AWG (Arrayed Waveguide Grating) chip, interlayers, a bottom plate and a temperature compensating device, wherein the interlayers adopt a first interlayer and a second interlayer with the expansion coefficients being same or approximate to that of the AWG chip; the input waveguide, the input planar waveguide and the partial output planar waveguide of the AWG chip are fixed on the first interlayer, and the output waveguide of the AWG chip is fixed on the second interlayer; the AWG chip is divided into a first chip and a second chip along the direction of a cutting seam, and the first interlayer is divided into a first part and a second part; the first part of the first interlayer and the bottom plate are fixed by adopting bonding glue capable of realizing thermal expansion movement, and the second part of the first interlayer and the second interlayer are fixedly bonded with the upper surface of the bottom plate; one end of the temperature compensating device is fixed on the first chip or the upper surface of the first part of the first interlayer, and the other end of the temperature compensating device is fixed on the upper surface of the second interlayer. The method and device disclosed by the invention have the advantages that the structure is simple, the wavelength stability is high and the cost is low.

Description

technical field [0001] The invention relates to an athermal array waveguide grating wavelength division multiplexer and a manufacturing method thereof (athermal AWG), which belongs to the communication field. Background technique [0002] Arrayed waveguide gratings (AWG Arrayed Waveguide Gratings) are the most ideal devices for realizing multi-channel dense wavelength division multiplexing (DWDM Dense Wavelength Division Multiplexing) optical networks. In 1988, Smit of Delft University in the Netherlands first proposed the concept of AWG. Its basic function is to combine / demultiplex wavelengths. With its advantages of large number of channels, small size, easy integration with other devices, and low price, it has replaced the traditional The dense wavelength division multiplexing / demultiplexing device of TFF has been widely used in backbone network and metropolitan area network for many years; in addition, AWG can flexibly form multifunctional devices and modules with other ...

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Problems solved by technology

[0005] The current schemes have the following problems: 1. Single-layer chip structure is adopted, which requires less material and simple structure, but it is usually made of square chips, which is expensive for AWG chips that have been in commercial use for many years.

2. With a double-layer board structure, the chip itself is very sensitive to stress, and it is difficult to achieve a balance between stable wavelength and spectral deformation caused by stress, resulting in low yield

3. Use offset suppression components (such as spring clips) to place in the moving structure to ensure the stability of the work by reducing the influence of the glue layer on the flatness, but in the actual process, additional components will bring uncertainty influence, and will lead to irregular changes in wavelength under high and low temperature conditions

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