A kind of method for preparing magnesium boride superconducting film

Abstract

The invention discloses a device and a preparation method for preparing a magnesium borate super-conducting film. The device comprises a deposition chamber, wherein a bubble meter is communicated with the deposition chamber through a pipeline; a gas mixing device is communicated with the deposition chamber through a pipeline; the deposition chamber is communicated with a waste gas treatment device. The preparation method comprises the following steps: preparing a substrate; placing the substrate in a substrate container of a substrate heating device; closing the deposition chamber; vacuumizing; introducing 2 to 10 sccm of (Cp)2Mg and introducing Ar-diluted B2H6 gas to generate an MgB2 film; after a first layer of MgB2 film is generated, cutting off the (Cp)2Mg of the bubble meter and the Ar-diluted B2H6 gas supplied by the gas mixing device; vacuumizing the deposition chamber until the vacuum degree reaches 10 <-4> Pa, introducing 5 to 10 sccm of B2H6 gas; depositing an amorphous elemental boron layer at 450 DEG C to 600 DEG C; repeating the steps 3 to 5 to prepare a plurality of layers of MgB2 films. According to the device and the preparation method, the problems that the process is complicated, the preparation cost is high, the superconducting character of a finished product is degenerated because a sample is easily subjected to external pollution during a transferring process and the like in the prior art for preparing a multi-layer MgB2 superconducting film are solved.

Description

technical field [0001] The invention belongs to the field of superconducting electronics, in particular to a device for preparing a magnesium boride superconducting thin film and a preparation method thereof. Background technique [0002] Magnesium boride MgB 2 The superconducting properties of the material were discovered by Japanese scientists in 2001, and its superconducting transition temperature T c It has reached 39K, exceeding the upper limit of the superconducting transition temperature of simple intermetallic compounds predicted by the BCS theory, which has caused a huge sensation in the study of superconducting theory. In addition, MgB 2 Superconducting materials also have long superconducting coherence length, no weak connection effect between grain boundaries, large critical current, high critical magnetic field, abundant raw material sources, and low cost. Compared with the widely used niobium (Nb)-based superconducting materials (the working environment temp...

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Problems solved by technology

[0004] The technical problem to be solved by the present invention is to provide a device for preparing magnesium boride superconducting thin films and a preparation method thereof, so as to solve the problem of preparing multilayer MgB in the prior art. 2 Superconducting thin films require ex-situ operation, Mg vapor pressure is unstable, the process is complicated, the preparation cost is high, and the sample is easily contaminated by the outside during the transfer process, which will degrade the superconducting properties of the sample, etc.

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