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Interferometric distance measuring device and corresponding method

A distance measurement and interferometric technology, applied in the field of interferometric distance measurement devices, can solve the problems of increasing the complexity and quality of the probe

Active Publication Date: 2018-07-03
HEXAGON TECH CENT GMBH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

In addition to causing an increase in the complexity of the probe and the resulting increase in mass, especially the heating of the probe caused by current consumption has a negative effect

Method used

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  • Interferometric distance measuring device and corresponding method
  • Interferometric distance measuring device and corresponding method
  • Interferometric distance measuring device and corresponding method

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Embodiment Construction

[0040] figure 1 A schematic diagram showing a prior art interferometric device in a measuring device for measuring surfaces, such as described in WO2009 / 036861A1 or European Patent Application No. 11171582.7. This arrangement uses: a wavelength-modulated laser source 1 for generating at least one laser beam; and a radiation detector 5 for receiving measurement radiation MS backscattered by a surface 4 . In this case, the modulated laser source is preferably designed such that the laser source has a coherence length greater than 1 mm, in particular in the range from 1 mm to 20 cm, for example with a center wavelength between 1.3 and 1.7 microns, In addition, when the dynamic line width is less than 0.02nm and the coherence length is 60nm or greater than 60nm, the adjustable wavelength range is greater than 40nm. The coherence length thus also allows measurements at depths or distances of a few centimeters.

[0041] The laser radiation generated by the laser source 1 is couple...

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Abstract

The invention relates to an interferometric distance measuring device for measuring surfaces, having at least one laser source which can be tuned and which has a coherence length for generating a wavelength-ramp-modulated measuring radiation; an optical path having an optical transmission system for transmitting the measuring radiation to the surface and an optical capturing system for capturing the measuring radiation backscattered by the surface, the optical capturing system comprising a measuring arm and a reference arm; and A radiation detector and an evaluation unit for determining the distance from the reference point of the distance measuring device to the surface. At least one beam splitter defines n≧2 channels for the parallel emission of measurement radiation, each of which is assigned a different subfield of the measurement range defined by the coherence length.

Description

technical field [0001] The invention relates to an interferometric distance measuring device for measuring surfaces and a corresponding method. Background technique [0002] In many fields of application, object surfaces as well as objects themselves need to be measured with extremely high precision. This applies to manufacturing, especially where measuring and inspecting workpiece surfaces is important. For these applications, there are a large number of measuring devices, which are designed for specific tasks and are also designated as coordinate measuring devices or machines. These measuring devices measure surfaces by establishing mechanical contact and scanning the surface. Examples of such measuring devices include bench measuring machines, such as those described in DE4325337 or DE4325347. A different system is based on the use of an articulated arm with measurement sensors placed at one end of a multi-jointed arm that can be moved along the surface. Standard arti...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B9/02
CPCG01B9/02004G01B9/02027G01B9/02057G01B9/0205G01B11/007G01B9/02091
Inventor 托马斯·延森
Owner HEXAGON TECH CENT GMBH
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