Production method of terahertz narrow-band microwave absorber capable of dynamically adjusting absorption peak position

A terahertz and absorption peak technology, applied in the terahertz field, can solve the problems of limiting the frequency range of terahertz detectors, unable to dynamically control the position of absorption peaks, etc., to improve the sensitivity and operating frequency range, and achieve the effect of dynamic control
CN104555892AInactive Publication Date: 2015-04-29GUILIN UNIV OF ELECTRONIC TECH
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
GUILIN UNIV OF ELECTRONIC TECH
Publication Date
2015-04-29
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention discloses a production method of a terahertz narrow-band microwave absorber capable of dynamically adjusting the absorption peak position. The method mainly comprises technologies such as multilayer thin-film deposition on a silicon substrate, photoetching, dry etching, wet etching and the like. The method is characterized in that the produced microwave absorber adopts an array structure, a micro-mirror capable of rotating around a shaft under the effect of the electrostatic force is arranged in the center of each unit in the array structure, and an I-shaped metal resonator is arranged in the center of the surface of each micro-mirror and used for producing resonance absorption. The terahertz narrow-band microwave absorber produced with the production method of the terahertz narrow-band microwave absorber capable of dynamically adjusting the absorption peak position and applicable to a terahertz frequency band can dynamically and continuously adjust the absorption peak position, so that the defect that absorption peak positions of conventional terahertz microwave absorbers are not adjustable is overcome. The terahertz microwave absorber can greatly increase the frequency selectivity and has very important application values in fields of terahertz detection, terahertz filtering and frequency-selective terahertz thermal imaging.
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Description

technical field

[0001] The invention relates to the technical field of terahertz, in particular to a method for manufacturing a terahertz narrow-band wave absorber whose absorption peak position is dynamically adjustable. Background technique

[0002] At present, an important reason that restricts the popularization and application of terahertz technology is the lack of high-sensitivity terahertz detectors. In order to improve the detection sensitivity of terahertz detectors, those skilled in the art have recently proposed to make terahertz narrow-band absorbers on the receiving surface of thermal effect terahertz detectors, so as to improve the absorption rate of terahertz detectors for incident terahertz waves. Thereby improving the detection sensitivity. However, the existing terahertz narrow-band absorbers all have super-absorbing effects for certain specific frequencies or frequency bands, and cannot dynamically adjust the position of the absorption peak according to s...

Claims

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