Inductively coupled plasma mass spectrometer capable of regulating vacuum pressure

Abstract

The invention relates to an inductively coupled plasma mass spectrometer capable of regulating vacuum pressure. The inductively coupled plasma mass spectrometer capable of regulating the vacuum pressure comprises a first vacuum chamber, a second vacuum chamber, a third vacuum chamber, a fourth vacuum chamber, first tuning parts and second tuning parts, wherein the first tuning parts are pumps, and the pumps are connected with the vacuum chambers at various levels and used for regulating pressure of the vacuum chambers at various levels; the second tuning parts make the vacuum chambers at various levels communicated with each other, and are used for regulating pressure between the vacuum chambers at various levels. The inductively coupled plasma mass spectrometer capable of regulating the vacuum pressure has the advantages that the space-charge effect is optimized and reduced, the effects of anti spectrum interference and non-spectrum interference effect are improved, and the ion transport is optimized.

Description

technical field [0001] The invention relates to the field of mass spectrometry, in particular to an inductively coupled plasma mass spectrometer with adjustable vacuum system pressures at all levels. Background technique [0002] Inductively coupled plasma mass spectrometer (abbreviation: ICP-MS), the ion source is inductively coupled plasma, the sample is converted into ions in the plasma flame, and the plasma formed by the working gas, sample, matrix and solvent is passed through the differential vacuum double cone or The three cones are extracted into the vacuum system. Double cone or triple cone realize transition from atmospheric pressure to vacuum, from high temperature to normal temperature. The first cone of the double cone is the sampling cone, and the latter cone is the skimmer cone; the first cone of the triple cone is the sampling cone, the middle one is the skimmer cone, and the latter is the super skimmer cone. [0003] The vacuum system of ICP-MS can be divi...

AI Technical Summary

Problems solved by technology

At present, the vacuum system in ICP-MS adopts a fixed design, which cannot be adjusted and optimized, thus causing the following defects:

[0004] 1. The optimal position of the sampling cone for ultrasonic molecular beam extraction cannot be adjusted and optimized, and cannot meet the requirements for the use of skimmer cones of various shapes and calibers;

[0005] 2. After the skimmer cone, the plasma ion beam is electrically neutral before it is non-electrically neutral, and the electric field in the channel of the skimmer cone is not easy to penetrate, and the effect of the electric field cannot significantly improve the transmission;

[0006] 3. There is an ion space charge effect behind the skimmer cone, resulting in a very low ion transmission efficiency;

[0007] 4. In the collision response mode, it will affect the pressure at all levels of the original vacuum system, and the conditions cannot be optimized, and at the same time affect the scope and effect of the collision response mode

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