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Wavelength variable interference filter, optical module, and electronic device

An interference filter and filter technology, which is applied in optics, optical components, instruments, etc., can solve the problems of easy bending of the reflective film, reduction of spectral resolution, and inability to obtain spectral images, etc., to achieve half-width reduction and high resolution Effect

Inactive Publication Date: 2015-06-03
SEIKO EPSON CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, there is a problem that when the area of ​​the reflective film is increased, the reflective film becomes easily bent accordingly, and when the reflective film is bent, the spectral resolution in the variable wavelength interference filter decreases, and high-precision spectral resolution cannot be obtained. image

Method used

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  • Wavelength variable interference filter, optical module, and electronic device
  • Wavelength variable interference filter, optical module, and electronic device
  • Wavelength variable interference filter, optical module, and electronic device

Examples

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no. 1 approach

[0055] (Configuration of spectrometer)

[0056] figure 1 This is a block diagram showing a schematic configuration of a spectrometer using the variable wavelength interference filter according to this embodiment.

[0057] The spectrometer 1 is an example of the electronic equipment of the present invention, for example figure 1 As shown, an optical module 10 and a control unit 20 for processing a signal output from the optical module 10 are provided. This spectrometer 1 moves the optical module 10 relative to the measurement object X in a predetermined scanning direction to acquire a spectroscopic image. Furthermore, it is a device for analyzing the light intensity of each wavelength in each pixel of a spectral image to measure a spectral spectrum. In addition, in this embodiment, an example of measuring the measurement object light reflected by the measurement object X is shown. As the measurement object X, for example, when using a luminous body such as a liquid crystal p...

no. 2 approach

[0133] Next, a second embodiment of the present invention will be described based on the drawings.

[0134] In the first embodiment described above, an example was shown in which the gap G1 between the reflection films 54 and 55 has the same size in each filter unit 50 . In contrast, the second embodiment is different from the first embodiment in that it includes three types of filter units with different gaps between the reflection films 54 and 55 . In addition, the same code|symbol is attached|subjected to the same structure as said 1st Embodiment, and the description is abbreviate|omitted or simplified.

[0135] Figure 7 It is a plan view showing an arrangement example of filter sections of the variable wavelength interference filter according to the second embodiment. Figure 8 (A) to (C) are cross-sectional views showing gaps between the respective filter units.

[0136] The variable wavelength interference filter 5A of the second embodiment includes a plurality of fi...

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Abstract

A wavelength variable interference filter includes a plurality of filter units each of which includes a pair of reflecting films facing each other and a gap changing unit changing an interval between the pair of reflecting films. The plurality of filter units are two-dimensionally disposed with respect to an arrangement surface parallel to a reflecting surface of the reflecting film, and reflecting films of other filter units disposed at locations different from those on a first virtual straight line, intersecting a predetermined direction (first direction) along the arrangement surface, are disposed so as to overlap a portion of the reflecting films on the first virtual straight line without gaps therebetween between two reflecting films adjacent with a predetermined interval therebetween along the first virtual straight line, when seen from the predetermined direction (first direction).

Description

technical field [0001] The present invention relates to wavelength-variable interference filters, optical modules, and electronic devices for capturing light of a specific wavelength. Background technique [0002] There is known an interference filter which has a pair of reflective films facing each other, and by changing the distance (gap size) between the reflective films, light of a predetermined wavelength is selected from the light of the measurement object and emitted (for example, refer to Patent Document 1). [0003] In the interference filter disclosed in Patent Document 1, electrodes are arranged on each reflective film, and the gap size between the reflective films can be changed by applying a voltage between the electrodes. In addition, by using a dielectric multilayer film as a reflective film, light having a small half-wave width of the spectrum (high resolution) can be transmitted. [0004] For example, a case where the variable wavelength interference filte...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B5/28
CPCG02B26/001G02B5/0825G02B5/201
Inventor 佐野朗牧垣奉宏樱井和徳
Owner SEIKO EPSON CORP
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