An all-round auxiliary imaging system and method for a scanning electron microscope

Abstract

The invention discloses an all-round auxiliary imaging system and method for a scanning electron microscope. The auxiliary imaging system includes a rotating centering device installed on the base of the scanning electron microscope and a sample stage for placing scanned samples; The device includes a translation device and a rotation mechanism. The sample stage is fixed on the translation device; the sample is arranged parallel to the horizontal axis; the auxiliary imaging method includes steps: 1. Fix the sample; 2. Determine the sample rotation and imaging position. The process is as follows: sample initial Imaging position determination, first clockwise rotation and sample imaging position determination, counterclockwise rotation and sample imaging position determination and second clockwise rotation; 3. Imaging position comparison; 4. Sample translation; 5. Sample 360° rotation and All-round imaging. The invention is reasonable in design, convenient in realization and good in use effect, and can solve the problems that the existing scanning electron microscope has limited observation range and cannot observe samples in all directions.

Description

technical field [0001] The invention belongs to the technical field of scanning electron microscope applications, in particular to an omnidirectional auxiliary imaging system and method for scanning electron microscopes. Background technique [0002] Scanning electron microscope, the full name of scanning electron microscope (scanning electron microscope, English abbreviation SEM), is an electron microscope that uses electron beams to scan the surface of the sample to obtain sample information. It is mainly composed of three parts: vacuum system, electron beam system and imaging system. . Scanning electron microscope (SEM) scans the surface of the sample with a very thin electron beam, and collects the generated secondary electrons with a special detector, forms an electrical signal and sends it to the picture tube, and displays the object on the fluorescent screen with a resolution of up to 0.2 nanometers, much higher than the resolution of an optical microscope. Therefor...

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Problems solved by technology

[0004] The technical problem to be solved by the present invention is to provide an all-round auxiliary imaging system for a scanning electron microscope, which has a simple structure, reasonable design, convenient installation and layout, easy operation, and good scanning effect. The all-round auxiliary imaging system for electron microscopes can solve the problems of limited observation range and inability to observe samples in all directions in existing scanning electron microscopes

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