A multi-beam stepped plane mirror laser interferometer and its measurement method
A technology of flat mirrors and laser interferometers, which is applied to measuring devices, instruments, and optical devices, can solve problems such as difficulty in improving measurement accuracy, and achieve the effect of improving measurement accuracy
Active Publication Date: 2018-01-16
西安玉沣精密测量科技有限公司
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[0006] The purpose of the present invention is to overcome the disadvantages that the measurement accuracy of the existing laser interferometer can only measure and obtain integer multiples of the wavelength in the laser interference, and the measurement accuracy is difficult to improve. On the basis of the existing Michelson laser interferometer, multiple parallel laser beams and The stepped plane mirror realizes the alternate measurement of laser interference, and at the same time combines the micro-motion platform in the laser interference optical path to obtain the fractional part of the laser interference wave that cannot be obtained in the laser interference distance measurement, and improve the measurement accuracy of the laser interferometer
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Embodiment 1
[0027] Such as figure 1 Shown is the principle diagram of laser interferometry of the present invention. A multi-beam stepped mirror laser interferometer in this embodiment includes a laser source 1, a beam splitter 2, a micro-motion platform 3, and a stepped mirror 4 , moving reflector 5, and photodetector group (comprising photodetector 61 to 64), described laser source comprises n parallel laser beams, wherein n≥2, and described photodetector group comprises n photodetector, The stepped plane reflector includes n stepped reflective planes, and the distance between two adjacent reflective planes is equal to Wherein k is a natural number, and λ is the laser wavelength emitted by the laser source; after the laser light emitted by each of the laser sources is reflected by the beam splitter, it is respectively injected into a corresponding reflection plane, and each of the reflection planes will reflect the corresponding laser beam to each photodetector of the corresponding ph...
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The present invention relates to the technical field of laser interferometry, in particular to a multi-beam stepped plane mirror laser interferometer, comprising a laser source, a beam splitter, a stepped plane mirror, a moving mirror, a photoelectric detector group and a micro-motion platform. The reflective surface of the stepped plane mirror is n stepped planes, the distance between two adjacent reflecting planes is (k is a natural number), the laser source can generate multiple beams of parallel lasers, and the photodetector group has n photodetectors In the process of laser interferometry, n photodetectors will alternately be in the strongest laser interference state or the weakest interference state, and the measurement accuracy can be achieved. Counting, namely the introduction of AC signals in multi-optical interferometry, converts the measurement of DC levels in traditional laser interferometry into the measurement of AC signals, which improves the anti-interference ability of the interferometer.
Description
technical field [0001] The invention relates to the technical field of laser interferometry, in particular to a multi-beam stepped plane reflector laser interferometer. Background technique [0002] The emergence of lasers has enabled the rapid development of ancient interferometric technology. Lasers have the characteristics of high brightness, good directionality, monochromaticity and good coherence. Laser interferometry technology has been relatively mature. Laser interferometry system is widely used: measurement of precision length and angle, such as detection of linear scale, grating, gauge block, and precision screw; positioning detection system in precision instruments, such as control and correction of precision machinery; special purpose for large-scale integrated circuits Positioning detection systems in equipment and testing instruments; measurement of tiny dimensions, etc. In most laser interferometric length measurement systems, Michelson interferometers or sim...
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IPC IPC(8): G01B9/02
Inventor 张白潘俊涛康学亮
Owner 西安玉沣精密测量科技有限公司