MgO/Ag compound dielectric protective film and preparation method thereof
A composite dielectric and protective film technology, which is applied in the manufacture of discharge tubes/lamps, cold cathodes, and electrode systems, can solve problems that cannot meet the performance requirements of the dielectric protective film, and achieve the improvement of the secondary electron emission coefficient. Roughness, enhanced stability effects
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[0032] The following examples are further detailed descriptions of the present invention.
[0033] The present invention will be described in detail below in conjunction with the accompanying drawings.
[0034] Such as figure 1 with figure 2 As shown, the present invention provides a MgO / Ag composite dielectric protective film, and the composite dielectric protective film includes a MgO thin film and a MgO / Ag thin film. A layer of MgO / Ag composite dielectric protective film is provided on the surface of the MgO, wherein the thickness of the MgO film is 215nm, and the thickness of the MgO / Ag composite dielectric protective film is 30nm. The grain size of elemental Ag nanoparticles is 10nm. In the present invention, the MgO thin film is sputtered on the Si surface by a reactive magnetron sputtering method, and the MgO / Ag composite thin film is sputtered on the MgO thin film surface by a magnetron co-sputtering method.
[0035] The invention provides a method for preparing a...
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