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Low noise micro-cantilever beam thermal vibration signal measuring device

A micro-cantilever beam and signal measurement technology, applied in the field of optical measurement, can solve problems such as noise and large mechanical vibration

Inactive Publication Date: 2015-08-05
SHAOXING UNIVERSITY
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Problems solved by technology

[0005] The purpose of the present invention is to provide a low-noise micro-cantilever beam thermal vibration signal measurement device, which uses a bicite beam shifter to solve the noise problem caused by the large mechanical vibration of the optical components of the measurement device in the prior art

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  • Low noise micro-cantilever beam thermal vibration signal measuring device
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  • Low noise micro-cantilever beam thermal vibration signal measuring device

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Embodiment Construction

[0027] Such as Figure 1-2 As shown, a low-noise micro-cantilever thermal vibration signal measurement device includes a light incident component 1, a first interference arm optical path detection component 2 and a second interference arm optical path detection component 3, wherein the light incident component includes a laser 11 , a polarizer 12, a Glan Taylor prism 13, a first glass slide 14, a spherical beam splitter group 15, a first converging lens 16 and a bicite beam shifter 17 arranged in sequence on the propagation direction of the optical path of the laser 11, and the microcantilever The beam 4 is placed on the focal plane of the first converging lens 16. In this embodiment, the laser 11 is a He-Ne laser with a wavelength of 630nm. The device 12 polarizes into polarized light. The first slide 14 is a half slide, and the first slide 14 is mainly used to adjust the relative light intensity of the two beams of polarized light incident to the micro-cantilever beam 4; th...

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Abstract

The invention provides a micro-cantilever thermal shock signal measuring apparatus. The apparatus comprises an incident optical path assembly and two detection optical path assemblies. The incident optical path assembly comprises a line polarizer, a first spectroscope, a Wollaston prism, a first convergent lens and a second spectroscope. Polarization laser forms two beams of incident ray polarized light with mutually vertical polarization directions through the line polarizer, the first spectroscope and the Wollaston prism, after convergence, is respectively vertically incident to the tip end and the substrate of a cantilever arm, after reflection respectively, forms two beams of reflection polarized light with mutually vertical polarization directions, converges through the Wollaston prism and is incident to the second spectroscope to form two beams of detection polarized light. Each detection optical path assembly comprises a photoelectric detection circuit, the two beams of detection polarized light are respectively incident to the two photoelectric detection circuits, and the photoelectric detection circuits, after converting optical signals into electric signals, obtain a phase difference of the two beams of reflection line polarized light through calculating the two electric signals.

Description

technical field [0001] The invention relates to a low-noise micro-cantilever thermal vibration signal measuring device, which belongs to the technical field of optical measurement. Background technique [0002] Atomic Force Microscopy (AFM) is a high-precision analytical instrument for studying the surface structure of materials. It is widely used in materials, chemistry, biotechnology, nanotechnology and other fields. The force between atoms is used to study the surface structure and properties of matter. One of its main structures is a micro-cantilever beam. The interaction between the tip of the micro-cantilever beam and the sample makes the micro-cantilever beam deform, so that the atomic force microscope can measure extremely small forces. [0003] The vibration of the micro-cantilever beam caused by thermal noise—thermomechanical vibration is an important factor affecting the resolution of the atomic force microscope. The measurement and research of the thermomechanic...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01H9/00
Inventor 李天军
Owner SHAOXING UNIVERSITY
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