Horizontal continuous magnetron sputtering coating machine online panel constant temperature heating device
A technology of constant temperature heating and magnetron sputtering, applied in the field of machinery, can solve the problems of low quality and low production capacity of anti-reflection conductive film coating, and achieve the effects of low cost, fast response speed and simple mechanical structure
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[0019] The present invention will be further described below in conjunction with the accompanying drawings.
[0020] Such as figure 1 As shown, it is an online panel constant temperature heating device of a horizontal continuous magnetron sputtering coating machine, including a vacuum chamber 1, a working platform 2, a transmission guide rail 3, a transmission substrate 4, a copper conductive plate 5 and a copper disk electrode 6, and the working The platform 2 is arranged inside the vacuum chamber 1, and a pair of transmission guide rails 3 are arranged in parallel on the working platform, and the transmission guide rails 3 are slidably connected and horizontally provided with a transmission substrate 4 for transmitting the panel to be plated; the transmission substrate 4 is horizontally provided with The copper conduction plate 5 is equipped with an embedded thermocouple temperature measuring rod and a PTC constant temperature low-voltage heating element, and the power lead ...
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