Large-diameter laser liquid cooling mirror structure

Abstract

The invention discloses a large-diameter laser liquid cooling mirror structure, which comprises a reflection panel, a distribution plate and a back plate, wherein the back face of the distribution plate is provided with water inlet first-level flow channels and water outlet first-level flow channels; the front face of the distribution plate is provided with water inlet second-level flow channels and water outlet second-level flow channels distributed parallelly; a plurality of water inlet holes and water outlet holes are arranged in the back plate; and the front face of the reflection panel is a reflection face, and the back face is provided with third-level flow channels. By adopting a multilevel cooling flow channel structure based on interdigitated flow channels, cooling liquid with a large flow can be provided for transferring reflection face sedimentary hot under small water through pressure, pressure and flow of the cooling liquid inside each micro flow channel can be distributed comparatively uniformly, uniform cooling is realized on the reflection face, and over large thermal distortion of the large-diameter endoscope can be restrained. Adjacent second-level flow channels are communicated with the water inlet first-level flow channels and the water outlet first-level flow channels respectively and stacked with the third-level flow channels vertically, liquid does not need to flow through the whole section of the thin third-level flow channel, and flow resistance is greatly reduced.

Description

technical field [0001] The invention belongs to the field of laser optics, and specifically relates to a liquid-cooled reflector structure, in particular to a large-diameter laser liquid-cooled mirror configuration, which is mainly used for high-energy laser optical resonators and optical resonators with high requirements for high power density and surface shape accuracy. chain. Background technique [0002] The laser optical resonator mirror will absorb part of the energy when it is irradiated by laser light, which will cause the temperature of the mirror surface to rise. The wavefront is distorted, deteriorating the output beam quality and stability. Therefore, reducing the thermal distortion of the reflective surface and improving the accuracy of the surface shape are the keys to the development of high-power laser resonator mirrors. The current solution is mainly divided into three aspects: choose a base material with a low thermal expansion coefficient, so that the re...

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Problems solved by technology

[0005] In view of the above, in order to solve the shortcomings of the existing design methods, the present invention propo

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