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A fiber optic cantilever beam microphone for photoacoustic spectrum detection and its manufacturing method

A technology of photoacoustic spectroscopy and cantilever beams, applied in color/spectral characteristic measurement, instruments, measuring devices, etc., can solve the problems of accurate detection of unfavorable photoacoustic signals, displacement response is not strictly linear, etc., to avoid inaccurate measurement, Effect of increasing practicality and reducing manufacturing cost

Inactive Publication Date: 2018-01-05
HEFEI INSTITUTES OF PHYSICAL SCIENCE - CHINESE ACAD OF SCI
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Problems solved by technology

However, when the capacitive microphone vibrates, the stretch of the elastic film is radial when the pressure changes, resulting in a non-strict linear displacement response, which is not conducive to the accurate detection of photoacoustic signals.

Method used

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  • A fiber optic cantilever beam microphone for photoacoustic spectrum detection and its manufacturing method
  • A fiber optic cantilever beam microphone for photoacoustic spectrum detection and its manufacturing method
  • A fiber optic cantilever beam microphone for photoacoustic spectrum detection and its manufacturing method

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Embodiment Construction

[0033] Such as image 3 As shown, the manufacturing method of the optical fiber cantilever beam microphone for photoacoustic spectrum detection of the present invention is as follows: first, the polymer annular film 14 is fixed on the laser processing table, and the nanosecond pulse laser is processed according to the set program to obtain the polymerized Object cantilever beam 13. The laser repetition frequency used in processing is generally 40kHz, and the average power is less than 1mW. The shape of the polymer cantilever beam can be controlled by software, and it is generally rectangular, so as to facilitate the connection with the fiber optic ceramic sleeve while maintaining high sensitivity. The processed cantilever beam 13 is welded together with the optical fiber ceramic sleeve 12 by laser cladding, and then the single-mode optical fiber 11 is inserted into the optical fiber ceramic sleeve 12 and the surface of the polymer cantilever beam to form an FP interference cavi...

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Abstract

The invention relates to a fiber optic cantilever beam microphone for photoacoustic spectrum detection and a manufacturing method thereof, comprising: a single-mode optical fiber, an optical fiber ceramic sleeve, a polymer cantilever beam and a polymer annular film for detection of photoacoustic spectrum signals; The production method is to process the polymer cantilever beam on the polymer annular film by pulse laser etching, and then fix the formed polymer cantilever beam and the optical fiber ceramic sleeve by laser melting. Form a stable Fabry-Perot cavity (FP) with the end face of the single-mode fiber. The invention has the advantages of high integration, small size, sensitive detection, intrinsic safety and the like.

Description

technical field [0001] The invention relates to a fiber optic cantilever beam microphone for photoacoustic spectrum detection and a manufacturing method thereof, which can be used for simultaneously detecting trace gases of different components, and is suitable for detecting toxic and harmful gases in industrial processes. Background technique [0002] The development of gas detection technology has important practical significance in the fields of air pollution monitoring, human daily life, industrial process control and human disease diagnosis. In recent years, with the development of industrial modernization, environmental changes have become increasingly complex, and people's awareness of environmental health is also increasing. Various toxic and harmful gas monitoring technologies are not only related to industrial and agricultural production, but also related to the health and life safety of human beings themselves, so they have attracted more and more researchers' att...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N21/17G01N21/31
Inventor 李俊董凤忠韩荦
Owner HEFEI INSTITUTES OF PHYSICAL SCIENCE - CHINESE ACAD OF SCI
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