Two-freedom degree motion-decoupling flexible hinge mechanism

Abstract

The invention discloses a two-freedom degree motion-decoupling flexible hinge mechanism. The mechanism comprises a flexible hinge matrix and a driving branched chain. The flexible hinge matrix comprises flexible hinge branched chains and a rigid connection member. The rigid connection member comprises a terminal rigid output platform located in the middle of the flexible hinge matrix, and upper, lower, left and right rigid platforms respectively located at upper, lower, left and right parts of the flexible hinge matrix. The upper, lower, left and right rigid platforms are respectively connected to the terminal rigid output platform by the flexible hinge branched chains and are respectively connected to the rigid matrix of the flexible hinge matrix by the flexible hinge branched chains. The two-freedom degree motion-decoupling flexible hinge mechanism realizes decoupling of motion and forces of the terminal along all directions and is conducive to improvement of a motion precision.

Description

technical field [0001] The invention relates to the technical field of mechanical design and manufacture, in particular to the design technology of a high-precision transmission mechanism. Background technique [0002] The micro-motion mechanism has the characteristics of motion precision, high resolution, compact structure, and small motion range. It is widely used in the field of micro-nano manipulation, such as atomic force microscope, photolithography mask platform, fine steel stone turning, precision motion platform, etc. A frequently used micro-motion mechanism is a flexible hinge. The flexible hinge utilizes the micro-deformation and self-recovery properties of elastic materials, eliminates the lost motion and mechanical friction in the transmission process, and can obtain high displacement resolution. Considering that the flexible hinge has no friction, no wear, no lubrication, and has the advantages of compact structure, light weight, easy manufacturing and assembly...

AI Technical Summary

Problems solved by technology

In the parallel flexible hinge mechanism, there are two forms of space and planar parallel flexible hinge mechanism. Since the control of the flexible hinge mechanism requires the use of two-dimensional and three-dimensional flexible hinges, the processing is difficult and the accuracy is difficult to guarantee. Therefore, the planar flexible hinge mechanism is currently used more. hinge mechanism

[0004] Realizing the motion decoupling of the flexible hinge micro-motion mechanism is the focus and difficulty in the design of this type of mechanism. The current method is to add a decoupling structure, but the existing decoupling structure is relatively complicated, which increases the difficulty of processing and assembling the mechanism. The motion accuracy of the mechanism has a certain impact, and it will increase the quality of the moving parts of the mechanism and reduce its dynamic performance

The decoupling performance of the decoupling structure with a relatively simple structure is difficult to meet the requirements. Therefore, how to design a flexible hinge mechanism with a simple and compact structure and excellent decoupling performance is a challenging and urgent task.

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