Outer edge fixed type electrostatic driving multi-ring gyroscope and preparation method thereof

Abstract

The invention provides an outer edge fixed type electrostatic driving multi-ring gyroscope and a preparation method thereof. The gyroscope comprises a multi-ring resonator, a fixed sliding groove, a plurality of spokes, a cylindrical supporting rod and dispersive electrodes, wherein the multi-ring resonator contains five to eight rings; the fixed sliding groove supports the multi-ring resonator; the spokes are positioned between every two adjacent rings of the multi-ring resonator and are used for connecting the two adjacent rings of the multi-ring resonator; an angle difference exists between the positions of every two adjacent rings; the cylindrical supporting rod is positioned in the center of the multi-ring resonator; a central shaft of the cylindrical supporting rod is coincided with that of the multi-ring resonator; the dispersive electrodes are positioned on the cylindrical supporting rod; the outermost ring of the multi-ring resonator is fixed, and only radial free vibration is retained. Due to the fact that the outer edge of the multi-ring resonator is fixed and the dispersive electrodes are arranged in the center of the inner ring, the outer edge fixed type electrostatic driving multi-ring gyroscope has the advantages of small size, stable structure, sensitive response and the like, and is high in symmetry, so that higher performance can be achieved.

Description

technical field [0001] The invention relates to a solid wave mode matching gyroscope in the field of micro-electromechanical technology, in particular to an outer edge fixed electrostatically driven multi-ring gyroscope and a preparation method thereof. Background technique [0002] Gyroscope is an inertial device that can be sensitive to the angle or angular velocity of the carrier, and it plays a very important role in the fields of attitude control, navigation and positioning. With the development of national defense technology and aviation and aerospace industries, the requirements of inertial navigation systems for gyroscopes are also developing in the direction of low cost, small size, high precision, multi-axis detection, high reliability, and adaptability to various harsh environments. The micro gyroscope based on MEMS technology is processed by micro-nano batch manufacturing technology, its cost, size, and power consumption are very low, and its environmental adapta...

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Problems solved by technology

[0005] This technology has the following disadvantages: the hemispherical resonant gyroscope is difficult to process because it involves spherical processing, and the process error is difficult to control; the cavity of the hemispherical resonator is obtained by etching, and the sphericity is not high enough, and the sphericity of the hemispherical resonator largely depends on the hemisphere The cavity of the resonator has a great influence on the performance of the gyro; the contact area between the hemispherical resonator and the support body of the gyro is small, and there is a possibility of fracture under high-frequency vibration, and the reliability is not high; the processing technology of the gyro is relatively complicated. High processing cost, not suitable for mass production

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