Mach-Zehnder modulation type resonant cavity sensor based on vernier effect

A vernier effect and modulation technology, which is applied in the measurement of phase influence characteristics, etc., can solve the problems of difficulty in miniaturization and portability of devices, difficulty in making devices, and small detection range, so as to facilitate miniaturization and arraying, and improve Effects of improving sensitivity and alignment accuracy

Inactive Publication Date: 2015-09-30
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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Problems solved by technology

[0004] However, the existing single Mach-Zehnder coupled micro-ring sensing structure has a small detection range, and it is difficult to manufacture the device and it is difficult to realize the miniaturization and portability of the device.

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  • Mach-Zehnder modulation type resonant cavity sensor based on vernier effect
  • Mach-Zehnder modulation type resonant cavity sensor based on vernier effect
  • Mach-Zehnder modulation type resonant cavity sensor based on vernier effect

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Embodiment Construction

[0020] The present invention will be described in further detail below in conjunction with the accompanying drawings and embodiments.

[0021] Such as figure 1 and figure 2 As shown, a Mach-Zehnder-modulated resonant cavity sensor based on the vernier effect in this embodiment includes an SOI substrate composed of a silicon-based layer 5, a silicon dioxide layer 6 and a single-crystal silicon layer that are sequentially stacked and bonded from bottom to top. , the single crystal silicon layer of the SOI substrate contains a U-shaped waveguide 1 and a ring resonant cavity 2 in the same plane, and the U-shaped waveguide 1 and the ring resonant cavity 2 are passive ridge waveguides or strip waveguides; wherein the U-shaped waveguide 1 includes the first A coupled straight waveguide 11, a second coupled straight waveguide 12, a first circular arc connecting waveguide 13, a third coupled straight waveguide 14, a fourth coupled straight waveguide 15, a second circular arc connecti...

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Abstract

The invention discloses a Mach-Zehnder modulation type resonant cavity sensor based on the vernier effect. The Mach-Zehnder modulation type resonant cavity sensor comprises a silicon substrate, a silicon dioxide layer and a single crystal silicon layer which are arranged form the bottom up sequentially to form an SOI base body; the single crystal silicon layer of the SOI base body comprises a U-shaped waveguide and a circular resonant cavity which are arranged on the same plane. The Mach-Zehnder modulation type resonant cavity sensor provided by the invention has the advantages that remodulation of the circular resonant cavity can be realized through a sensing structure cascaded with double Mach-Zehnder interferometers and the circular resonant cavity, and the frequency spectrum of the Mach-Zehnder interferometers and that of the circular resonant cavity are overlapped effectively, so that the alignment accuracy can be improved on the basis of the vernier effect, the sensitivity of a device is improved effectively, and detection in a large dynamic range can be realized. Moreover, due to the structured integration, not only can the integral size of the device be reduced, but also the device can be miniaturized and arrayed more conveniently, and the quasi-free spectral region of the device can be expanded remarkably.

Description

technical field [0001] The invention relates to the detection technology of specific chemical or biological substances such as gas molecules or biomolecules, specifically relates to the field of photobiochemical sensing technology, and particularly relates to a Mach-Zehnder modulated resonant cavity sensor based on the vernier effect. Background technique [0002] Since entering the 21st century, with the rapid development of science and technology, people's living standards have been continuously improved, but at the same time, more and more environmental problems have become increasingly prominent. In aspects closely related to one's own health, such as environmental monitoring, disease treatment, etc., the safety requirements for food, medicine, and water quality have also increased significantly. At the same time, on the military battlefield, biological and chemical weapons, as a new type of intelligent weapon, are gradually applied to modern warfare. Therefore, there i...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/45
Inventor 王卓然袁国慧陈昱任孙文瀚王军
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA
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