Differential optical fiber FAP acceleration sensor based on 45° optical fiber and its processing method

Abstract

The present invention is based on the 45° optical fiber differential optical fiber FAP acceleration sensor and its processing method, belonging to the technical field of acceleration sensors; the sensor includes a mass block that is thick in the middle, thin around, and coated with reflective films on the upper and lower surfaces, and is symmetrically arranged on both sides of the mass block. The silicon support structure on the side, each silicon support structure and the mass block form a enamel cavity, and at the position where the side of each silicon support structure is close to the bottom, an optical fiber with a polished end face of 45° is inserted; this method first processes A silicon support structure with an optical fiber socket and a quality block coated with a reflective film on the upper and lower surfaces are provided, and then the top of the silicon support structure is bonded to the surface of the mass block coated with a reflective film, and then the optical fiber is inserted and adjusted from the optical fiber socket. Finally, the optical fiber socket is sealed; the present invention can not only meet the technical requirements of being attached to the surface of the measured object, but also solve the problem of poor stability of the coaxial extrinsic optical fiber FRP cavity acceleration sensor, and at the same time improve the sensor’s stability. measurement accuracy.

Description

technical field [0001] The invention relates to a 45° optical fiber-based differential optical fiber Fappaux acceleration sensor and a processing method, which belong to the technical field of acceleration sensors. Background technique [0002] In the fields of aerospace, military ships, biomedicine, and construction, it is necessary to measure acceleration, and the measurement of acceleration is inseparable from the acceleration sensor. As an important part of the acceleration sensor, the fiber optic sensor has been developed rapidly. [0003] At present, common fiber optic sensors include fiber optic accelerometers based on ring cavity interferometers, fiber optic accelerometers based on Michelson interferometers, fiber optic accelerometers based on Mach-Zehnder interferometers, fiber optic accelerometers based on fiber Bragg gratings, based on Optical fiber accelerometer with intrinsic fiber optic cavity, etc. The common feature of these sensors is that the optical fibe...

AI Technical Summary

Problems solved by technology

[0009] In view of the above problems, the present invention discloses a differential optical fiber FAP acceleration sensor based on a 45° optical fiber, and discloses the processing method of the sensor. The acceleration sensor can not only meet the technical requirements of being attached to the surface of the measured object, Moreover, it can solve the problem of poor stability of the coaxial extrinsic fiber optic fiber cavity acceleration sensor. At the same time, it is designed as a differential structure, which can also expand the linear area, suppress common mode noise, and improve the measurement accuracy of the sensor.

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