Grinding tools and grinding devices

A technology of grinding tool and grinding sheet, which is applied in the direction of grinding tools, etc., can solve the problems of grinding processing and failure to realize practicality, and achieve the effects of reducing detachment, no scratches on the quality of the processed surface, and suppressing local contact

Active Publication Date: 2017-10-31
RICOH KK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In this way, the entire grinding surface cannot be ground at the same time, so the shape accuracy will be worse than the case of using free abrasive particles.
However, the problem is exacerbated if the abrasive sheet is processed by attaching the abrasive sheet to the base material or pad as in the case of using the free abrasive particles
Therefore, in fact, the practical application of large-area abrasive processing that can effectively utilize the characteristics of abrasive sheets has not been realized.

Method used

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  • Grinding tools and grinding devices
  • Grinding tools and grinding devices
  • Grinding tools and grinding devices

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0082] First, a second elastic layer was made. As a material of the elastomer, natural rubber (asker C hardness: 85) was used. The thickness of the part of the flat part 1b constituting the second elastic layer is 0.35 mm, and a plurality of (many) cylindrical protrusions 1a are formed integrally with the flat part 1b. The diameter of the convex portion 1a is 2mm, such as figure 2 As shown, they are arranged in a staggered manner at 60°, the interaxial distance (horizontal interval) between each other is 3mm, and the height is 1mm. When producing this second elastic layer, natural rubber is poured into a stainless steel mold satisfying the above-mentioned dimensions, and after molding, it is released from the mold to integrally mold the flat portion 1b and the plurality of protrusions. Regarding the softness of the second elastic layer obtained in this way, the value measured based on the ASKER C hardness measurement of the second elastic layer was 73.

[0083] As the firs...

Embodiment 2

[0098] Then, the influence of the height of the convex portion of the second elastic layer was investigated. In the same manner as in Example 1 (thickness of the flat plate portion was fixed at 0.35 mm), an examination was conducted in which only the height of the cylinder of the convex portion was changed.

[0099] Figure 8 In , the horizontal axis is the ratio of the height of the convex portion / the thickness of the flat plate portion, and the vertical axis is the value measured based on the Asker C hardness measurement, showing the results of the investigation.

[0100] Regarding natural rubber (asker C hardness: 85), it can be understood that the rubber hardness decreases as the height of the convex portion becomes higher. Figure 9 (a) shows the detection status of the prescaler part when the ratio of the height of the convex part to the thickness of the flat part is 0.88. It can be understood here that when the ratio of the height of the convex part to the thickness o...

Embodiment 3

[0104] Similar to Example 1, however, instead of the predetermined portion, fixed on the surface of the composite elastic layer is a polishing film produced by fixing the abrasive grains disclosed in Patent Document 2 to the polishing surface using an adhesive. As a result of processing an optical glass disc (borosilicate glass (equivalent to BK7)) with a diameter of 100 mm adjusted to a maximum height roughness Rt of 2 μm, scratch-free and maximum height roughness Ry was obtained after 5 minutes of processing It is a mirror surface at 30nm. The polishing conditions at this time were: the number of plate rotations was 60 rpm, the processing pressure was 30 kPa, and the amount of pure water supplied as cooling water to the polishing surface was 200 ml / min. As a result of measuring the thickness of the polished material at 10 locations, the error was within 0.5 μm, and it was confirmed that the polishing was performed with sufficient high precision. Then, the grinding process w...

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Abstract

The invention provides a lapping tool which fixes grinding particles while achieving high processing quality such as non-scrape and high shape precision. With the lapping tool, the come-off of grinding materials can be reduced and the grinding face increased. The lapping tool is composed of a first elastic layer, a second elastic layer and a grinding sheet, wherein the first elastic layer is formed by elastic body with C ASKER hardness 40, and the second elastic layer has a flat plate and a plurality of convex parts which are positioned on the same plane. The C ASKER rubber hardness tester is used to measure the surface of the flat plate and the convex part. The surface of the grinding sheet is installed on the plane and the other surface is fixed with 77.

Description

technical field [0001] The invention relates to a grinding tool used for finishing glass, ceramics, silicone and other brittle materials and a grinding device equipped with the grinding tool. Background technique [0002] In order to planarize parts made of various brittle materials such as silicon wafers and glass disks, abrasive processing is performed using free abrasive grains. Good roughness of the polished surface can be obtained through this planarization process, but it is pointed out that there is a problem of deterioration of the shape accuracy of the processed surface because of the tendency for warping, sagging, and surface unevenness to occur. In order to improve the flatness of the grinding surface, as the grinding tool, the grinding pad is mainly made of hard resin material, and in order to suppress local contact, the surface flatness of the grinding pad is improved by dressing, so as to deal with the above problems. [0003] However, as the size of the wafer...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B24B37/11
CPCB24B37/11
Inventor 张军沢田清孝肥塚恭太
Owner RICOH KK
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