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Method for quantitative analysis on material organization through scanning electron microscope and energy disperse spectrometer

A quantitative analysis and scanning electron microscope technology, which is applied in material analysis using wave/particle radiation, material analysis using secondary emission measurement, and material analysis, to achieve fast measurement operation, high measurement accuracy, and obvious contrast.

Inactive Publication Date: 2015-11-18
SHOUGANG CORPORATION
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Problems solved by technology

[0006] The purpose of the present invention is to provide a method for quantitative analysis of material structure using scanning electron microscope and energy spectrometer, which solves the problem of rapid quantitative analysis of fine structure and component difference phase under high magnification

Method used

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Examples

Experimental program
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Embodiment 1

[0016] A specific implementation method of a method for quantitative analysis of material structure using a scanning electron microscope and an energy spectrometer:

[0017] Take the quantitative analysis of slag phase in titanium ore pellets as an example.

[0018] (1) Sample preparation

[0019] The sample is a titanium ore pellet with a diameter of about 1 cm. After it is hot-mounted with bakelite powder, it is ground and polished to prepare a flat observation surface.

[0020] (2) Sample observation

[0021] Put the prepared sample into the sample chamber of the electron microscope, vacuumize, apply filament current, center the astigmatism, and the working distance is 10mm to obtain a clearly focused electronic image. The sample is observed in the backscattered image composition mode. Under the backscattered mode of the scanning electron microscope, the titanium phase and the slag phase in the sample show different contrasts due to the difference in atomic mass. The tita...

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Abstract

The invention discloses a method for quantitative analysis on material organization through a scanning electron microscope and an energy disperse spectrometer and belongs to the technical field of metal material detection. The method specifically includes the steps that a sample is prepared, wherein the surface of the sample is cleaned and polished; the sample is observed, wherein the prepared sample is put into an electron microscope sample room, and a clearly-focusing electronic image is obtained; data collecting and processing are conducted, wherein the area percentage of a tested phase in the field is displayed; thresholds are selected, wherein selection of the thresholds affects the measuring accuracy; data is output, wherein an experiment result is output in the mode of a color bitmap or a form report. The method has the advantages that the method is suitable for various metal materials, iron and steel products, minerals and fireproof materials and is fast in measuring operation and convenient to use.

Description

technical field [0001] The invention belongs to the technical field of metal material detection, in particular to a method for quantitative analysis of material structure by using a scanning electron microscope and an energy spectrometer. Background technique [0002] Materials are generally composed of one or more phases, and the proportion of each constituent phase has always been a basic concern in the material field. There are many methods for microscopic quantitative analysis of the constituent phases in materials, such as quantitative metallographic analysis, X-ray backscattering diffraction analysis (EBSD), X-ray diffraction analysis (XRD) and so on. The metallographic quantitative analysis method is a relatively intuitive and commonly used one. The principle is to make certain geometric measurements on the microstructure with different contrasts on a two-dimensional plane (sample polishing plane or analysis surface), and then calculate the apparent contrast in the th...

Claims

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Application Information

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IPC IPC(8): G01N23/22G01N23/203
Inventor 任群蔡宁鞠新华尹立新严春莲孟杨姚武刚康伟
Owner SHOUGANG CORPORATION
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