Piezoresistive pressure sensor and preparation method thereof

Abstract

The invention discloses a piezoresistive pressure sensor and a preparation method thereof. The pressure sensor comprises an LCP substrate, an LCP thin film layer, metal electrodes, a graphene thin film layer and a graphene array layer. The LCP thin film layer is fixedly connected to the LCP substrate; the LCP thin film layer is provided with through holes in an array structure; the metal electrodes are connected above the two ends of the LCP thin film layer; the graphene thin film layer is connected on the LCP thin film layer; the graphene thin film layer fills a gap between the metal electrodes and covers the metal electrodes; and the graphene array layer fills the through holes in the LCP thin film layer, and the graphene thin film layer is connected with the graphene array layer. The piezoresistive pressure sensor not only has the advantage that the substrate can be bent and deformable, but also has good sensitivity, and can be widely applied to the fields of biomedicine and wearable equipment and the like.

Description

technical field [0001] The invention relates to a pressure sensor, in particular to a piezoresistive pressure sensor and a preparation method thereof. Background technique [0002] Traditional silicon-based pressure sensors are rarely used in many fields such as biomedicine due to the inflexibility of their substrates. At the same time, there is an urgent need for flexible substrate pressure sensors that can be bent and deformed for use in many fields. The structure of the existing silicon-based piezoresistive pressure sensor is to make four pressure-sensitive resistors in the stress concentration area by diffusion or ion implantation on a square or circular silicon strained film, and the four resistors are interconnected to form a Whiston bridge. Through the Wheatstone bridge, the change of the resistance value of the four pressure-sensitive resistors caused by the external pressure is converted into an output voltage, and the measurement of the pressure can be realized b...

AI Technical Summary

Problems solved by technology

However, the silicon-based piezoresistive pressure sensor with this structure is inflexible and has poor biocompatibility, which leads to the urgent need for the use of pressure sensors in many fields such as biomedicine and wearable devices.

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