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Organic semiconductor thin film production method

A technology of organic semiconductors and organic transistors, applied in semiconductor/solid-state device manufacturing, semiconductor devices, transistors, etc., can solve problems such as unsuitable high-yield production methods for organic semiconductors, and achieve high carrier mobility.

Inactive Publication Date: 2015-12-02
KOBE UNIV +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The method described in Non-Patent Document 1 requires the use of a large amount of solvent, which has a negative impact on the environment, and is not suitable for high-throughput production methods of organic semiconductors such as Roll-to-Roll

Method used

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  • Organic semiconductor thin film production method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0143] 1.1 Manufacture of casting mold

[0144] For the production of the template, a commercially available CD-R made of polycarbonate was used as a casting mold. The CD-R is constituted from below: a resin layer made of polycarbonate, a recording layer of an organic dye film, a reflective layer made of metal, and a protective layer having a label surface. Here, the resin layer is used as a mold. To use the resin layer as a mold, the reflective layer is removed (by using tweezers or Cellotape(R)). The resin layer was cleaned with ethanol to completely remove the recording layer remaining on the resin layer.

[0145] 1.2 Manufacture of formwork

[0146] A template composed of polydimethylsiloxane (PDMS) was fabricated by using the polycarbonate mold described above. First, PDMS (substrate) and curing agent were mixed in a weight ratio of 10:1. This gel-like PDMS was injected onto a cast made of CD-R. The PDMS was cured at 80 °C for 2 hours, and the solid PDMS was removed...

Embodiment 2

[0169] 4. Manufacture of alignment film of TIPS-pentacene (compound (10))

[0170] By the same operation as in Example 1, a TIPS-pentacene toluene solution (0.5% by weight) was prepared. Substrates (Si or glass) were ultrasonically cleaned with detergent, ion-exchanged water and acetone for 15 minutes each. A 1.6 μm-epoxy mold having a periodic groove structure was placed on the substrate in an air atmosphere, and heated at 80° C. to 90° C. for 2 minutes to thereby cause close adhesion of the mold and the substrate. The TIPS-pentacene solution was poured on the outside of the mold at room temperature; and the TIPS-pentacene solution was introduced into the unused space formed by the substrate and the recess by capillary force. After the solvent was completely evaporated (after 10 to 15 minutes), the mold was removed to thereby form a TIPS-pentacene alignment film.

[0171] [Formula 11]

[0172]

[0173] 5. Evaluation of the structure of TIPS-pentacene oriented film

[0...

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Abstract

The purpose of the present invention is to provide an organic semiconductor thin film forming method, and an organic semiconductor device production method which uses the same. This organic semiconductor thin film production method involves a step for arranging on the substrate a mold having recesses, and a step for introducing an organic semiconductor solution into the gaps formed by the recesses and the substrate.

Description

technical field [0001] The present invention relates to a method of forming an organic semiconductor thin film and a method of manufacturing an organic semiconductor device using the organic semiconductor thin film. Background technique [0002] A field effect transistor, which is essential to an organic semiconductor device, has a structure in which an organic semiconductor thin film is formed between electrodes, and its manufacture usually relies on a relatively expensive vacuum deposition method or the like. Many organic compounds with high carrier mobility that have been used as raw materials for organic field effect transistors are difficult to dissolve in organic solvents. Inexpensive means such as coating printing cannot therefore be used. [0003] Solvent-soluble organic semiconductor materials that achieve practical horizontal mobility have recently been developed, whereby semiconductor devices are expected to be inexpensively manufactured. Various methods, includ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L51/40H01L21/336H01L21/368H01L29/786H01L51/05H01L51/30H10K99/00
CPCH01L51/0003H01L51/0508H01L51/0545H01L51/055H10K71/12H10K10/46H10K10/481H10K10/466
Inventor 上田裕清三崎雅裕滨田雅裕贞光雄一
Owner KOBE UNIV