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Evaporation mask plate and evaporation device

A mask and evaporation technology, applied in the field of display equipment manufacturing, can solve the problem of uneven thickness of thin film layers

Inactive Publication Date: 2015-12-09
BOE TECH GRP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] Embodiments of the present invention provide an evaporation mask and evaporation equipment, which can improve the problem of uneven thickness of the evaporated film layer

Method used

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  • Evaporation mask plate and evaporation device
  • Evaporation mask plate and evaporation device
  • Evaporation mask plate and evaporation device

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Embodiment Construction

[0027] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0028] An embodiment of the present invention provides an evaporation mask 20, such as Figure 1b The shielding area 42 and the vapor deposition area 40 are shown at intervals, and the shielding area 42 is provided with a shielding part 201, wherein the shielding part 201 can block the vapor deposition material from reaching such as Figure 1a Substrate 10 is shown. On this basis, the evaporation mask 20 is as Figure 1a Also shown is a baffle 202 covering at ...

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Abstract

The embodiment of the invention provides an evaporation mask plate and an evaporation device and relates to the field of display device manufacturing. The evaporation mask plate and the evaporation device can relieve the issue that an evaporated film layer is not uniform in thickness. The evaporation mask plate comprises shielding areas and evaporating areas, wherein the shielding areas and the evaporating areas are arranged in a spaced mode. The shielding areas are provided with shielding parts. The evaporation mask plate further comprises baffles at least covering the evaporating areas. Each baffle comprises a plurality of evaporating subareas, wherein each evaporating subarea is internally provided with a plurality of opening holes, the evaporating subareas comprise one first evaporating subarea, the sum of the area of all the opening holes in the unit area of the first evaporating subarea is minimum relative to that of other evaporating subareas, and the nearer the evaporating subareas are to the first evaporating area, the smaller the sum of the area of the opening holes in the unit area of the evaporating subareas is.

Description

technical field [0001] The invention relates to the field of display device manufacturing, in particular to an evaporation mask and evaporation equipment. Background technique [0002] With the rapid progress of display technology, semiconductor element technology, which is the core of the display device, has also been greatly improved. For existing display devices, organic light emitting diode (OrganicLightEmittingDiode, OLED), as a current-type light-emitting device, is more and more popular because of its characteristics such as self-illumination, fast response, wide viewing angle and the ability to be fabricated on a flexible substrate. It is increasingly used in the field of high-performance display. [0003] OLED devices in the prior art include a cathode, an anode and a functional layer between the cathode and the anode. The functional layer includes a hole injection layer, a hole transport layer, an organic light emitting layer, an electron transport layer and an e...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/04C23C14/24
CPCC23C14/044H10K71/164H10K71/166H10K71/00C23C14/042
Inventor 李晓虎孙中元
Owner BOE TECH GRP CO LTD