Electron beam processing equipment precision acceleration power supply device and control method thereof

A technology of electron beam processing and power supply device, which is applied in the direction of output power conversion device, electrical components, AC power input to AC power output, etc. It can solve the problems of light-load current peak pulse voltage, etc. The effect of improving machining accuracy and improving precision

Inactive Publication Date: 2015-12-09
GUILIN THD TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The technical problem to be solved by the present invention is to provide a precision acceleration power supply device and control method for electron beam processing equipment that uses synchronous Buck circuit voltage regulation to solve the problem of intermittent peak pulse voltage in light-load current.

Method used

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  • Electron beam processing equipment precision acceleration power supply device and control method thereof
  • Electron beam processing equipment precision acceleration power supply device and control method thereof
  • Electron beam processing equipment precision acceleration power supply device and control method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0064] like figure 1 As shown, a precision acceleration power supply device for electron beam processing equipment includes a line filter 1, a low-voltage rectification filter unit 2, a DC-DC conversion unit 3, an inverter unit 4, a high-voltage unit 5 and a regulator 6. The input end of the line filter 1 is connected to the external grid, and the output end of the line filter 1, the input end of the low-voltage rectification filter unit 2, the DC-DC conversion unit 3, the inverter unit 4 and the high-voltage unit 5 are connected in series in sequence, The high-voltage output end of the high-voltage unit 5 outputs a high-voltage electric connection to the cathode of the electron gun, and the high-voltage feedback signal U output by the signal end of the high-voltage unit 5 is sent to the second input end of the regulator 6, and the second input terminal of the regulator 6 One input input high voltage given signal U * , the output end of the regulator 6 is connected to the sig...

Embodiment 2

[0101] The structure of Embodiment 2 is basically the same as that of Embodiment 1, except for the inverter unit 4 .

[0102] like Figure 5 As shown, the inverter unit 4 includes a capacitor C5, a C-phase inverter, a D-phase inverter and a third drive pulse generator 4-2, and the C-phase inverter and the D-phase inverter are all connected to the third drive pulse generator 4-2;

[0103] The capacitor C5 is connected in parallel to both ends of the output of the DC-DC conversion unit 3;

[0104] The C-phase inverter includes switching power transistors V7-V10, the collector of the switching power transistor V7 is connected to the positive output terminal of the DC-DC conversion unit 3, the emitter of the switching power transistor V7 is connected to the The collectors of the switching power tube V9 are connected to each other, and serve as the first output terminal of the C-phase inverter, and the emitter of the switching power tube V9 is connected to the negative output ter...

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Abstract

The present invention relates to an electron beam processing equipment precision acceleration power supply device and a control method thereof. The electron beam processing equipment precision acceleration power supply device comprises an incoming line filter, a low voltage rectification filtering unit, a DC-DC conversion unit, an inverter unit, a high voltage unit and a regulator, the input end of the incoming line filter is connected with an external power grid, and the output end of the incoming line filter, the low voltage rectification filtering unit, the DC-DC conversion unit, the inverter unit and the input end of the high voltage unit are connected in series orderly, and the high voltage output end of the high voltage unit outputs a high voltage and is electrically connected with the cathode of an electronic gun. A high voltage feedback signal U outputted by the signal end of the high voltage unit is sent to the second input end of the regulator, the first input end of the regulator inputs a high voltage given signal U*, and the output end of the regulator is connected with the signal end of the DC-DC conversion unit. Relative to the prior art, the electron beam processing equipment precision acceleration power supply device and the control method thereof of the present invention utilize a synchronous Buck circuit to regulate the voltage, thereby solving the problem that a light load current generates a peak pulse voltage interruptedly.

Description

technical field [0001] The invention relates to the field of electron beam processing equipment, in particular to a precision acceleration power supply device and a control method for electron beam processing equipment. Background technique [0002] In electron beam processing equipment such as precision electron beam welding machines, electron beam drilling machines, and electron beam rapid prototyping machines, the acceleration power supply adopts a closed-loop control method, and the control accuracy can generally meet the requirements when the average value is used as a measure. The closed-loop control for suppressing the ripple with the value of metric is powerless. Acceleration power supply is obtained by AC boosting and then rectification and filtering. In addition to the ripple of normal rectification waveform, the effect of AC inductance in the high-voltage rectification process makes the DC output waveform sag, thus forming larger ripples. The operating current of...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H02M9/06H02M5/458
Inventor 黄小东韦寿祺秦玉江陆苇黄地送王宗坤梁祖明龙泽军
Owner GUILIN THD TECH CO LTD
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