A Computational Intensity Correlation Imaging Autocollimator and Measurement Method

Abstract

A computational intensity correlation imaging autocollimator and measurement method, comprising: a light source, a digital micromirror array DMD, a controller, a beam splitter, a lens, a mirror of a test piece, a CCD and an intensity correlation calculation module; the synchronization of the controller The control module generates a synchronous clock signal to act on the digital micromirror array DMD and CCD. The intensity correlation calculation module simultaneously records the light field modulation matrix generated by the light field modulation module and the echo signal received by the CCD, and performs second-order intensity correlation calculation. The tiny rotation angle of the DUT is obtained through indirect calculation. The invention introduces the computational correlation imaging method in the quantum imaging technology into the design of the autocollimator, which can effectively reduce the measurement error caused by air disturbance and other factors, and improve the sensitivity and stability of the system.

Description

technical field [0001] The invention relates to a calculation intensity correlation imaging autocollimator and a measurement method, belonging to the field of precision testing and measuring instruments. Background technique [0002] Autocollimator (also known as autocollimation measuring micro collimator) is a detection instrument that uses the principle of autocollimation to measure small angles. It converts the rotation angle of the reflector on the DUT into the line amount change on the receiving device of the autocollimator, and indirectly detects the small angle change of the reflective surface by measuring the line amount change. Autocollimator is mainly used in small angle measurement, flatness and parallelism measurement, etc. It is a commonly used measuring instrument in machinery manufacturing, aerospace industry, metrology, scientific research and other departments. [0003] Most of the commonly used autocollimators at this stage are CCD photoelectric autocollim...

AI Technical Summary

Problems solved by technology

However, whether it is a linear array CCD or an area array CCD photoelectric autocollimator, its accuracy is limited by parameters such as the number of CCD pixels and pixel size. Improve the measurement accuracy. In addition, the stability of the indication value of the traditional autocollimator is also severely challenged by the atmospheric disturbance caused by the heat generated by the machine.

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