A Computational Intensity Correlation Imaging Autocollimator and Measurement Method

A correlative imaging and autocollimator technology, applied in the direction of measuring devices, instruments, optical devices, etc., can solve the problems of significantly improving measurement accuracy and limited accuracy, so as to reduce the influence of atmospheric disturbance, reduce the jump of indication value, The effect of reducing measurement error
CN105157618BActive Publication Date: 2018-06-01BEIJING INST OF AEROSPACE CONTROL DEVICES
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
BEIJING INST OF AEROSPACE CONTROL DEVICES
Publication Date
2018-06-01

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Abstract

A computational intensity correlation imaging autocollimator and measurement method, comprising: a light source, a digital micromirror array DMD, a controller, a beam splitter, a lens, a mirror of a test piece, a CCD and an intensity correlation calculation module; the synchronization of the controller The control module generates a synchronous clock signal to act on the digital micromirror array DMD and CCD. The intensity correlation calculation module simultaneously records the light field modulation matrix generated by the light field modulation module and the echo signal received by the CCD, and performs second-order intensity correlation calculation. The tiny rotation angle of the DUT is obtained through indirect calculation. The invention introduces the computational correlation imaging method in the quantum imaging technology into the design of the autocollimator, which can effectively reduce the measurement error caused by air disturbance and other factors, and improve the sensitivity and stability of the system.
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Description

technical field

[0001] The invention relates to a calculation intensity correlation imaging autocollimator and a measurement method, belonging to the field of precision testing and measuring instruments. Background technique

[0002] Autocollimator (also known as autocollimation measuring micro collimator) is a detection instrument that uses the principle of autocollimation to measure small angles. It converts the rotation angle of the reflector on the DUT into the line amount change on the receiving device of the autocollimator, and indirectly detects the small angle change of the reflective surface by measuring the line amount change. Autocollimator is mainly used in small angle measurement, flatness and parallelism measurement, etc. It is a commonly used measuring instrument in machinery manufacturing, aerospace industry, metrology, scientific research and other departments.

[0003] Most of the commonly used autocollimators at this stage are CCD photoelectric autocollim...

Claims

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