Pixel structure of dual-layer visible/infrared hybrid imaging detector and fabrication method of pixel structure

Abstract

The invention provides a pixel structure of a dual-layer visible/infrared hybrid imaging detector and a fabrication method of the pixel structure. The pixel structure comprises a substrate, a visible sensing region, a metal interconnector and an infrared sensing region, wherein the visible sensing region is arranged on the lower surface of the substrate, the infrared sensing region is arranged on the upper surface of the substrate and comprises a first infrared sensing structure, a second infrared sensing structure, a contact groove structure, a support part and a dielectric layer, the first infrared sensing structure is arranged on the dielectric layer, the first infrared sensing structure and the second infrared sensing structure both are connected with the contact groove structure, the contact groove structure is connected with the metal interconnector, an electric signal formed by the first infrared sensing structure and the second sensing structure is transmitted to the metal interconnector through the contact groove structure, a first cavity is arranged in the substrate below the first infrared sensing structure, a second cavity is arranged between the second infrared sensing structure and the first infrared sensing structure, a third cavity is arranged between the support part and the second infrared sensing structure, and a fourth cavity is arranged in the substrate below the dielectric layer provided with a fourth releasing hole.

Description

technical field [0001] The invention relates to the technical field of microelectronics, in particular to a pixel structure of a double-layer visible light and infrared hybrid imaging detector and a preparation method thereof. Background technique [0002] With the development of industry and living standards, pure infrared imaging or pure visible light imaging can no longer meet the demand. Imaging technologies with wider wavelength bands have attracted more and more attention, especially imaging technologies that are sensitive to visible light and infrared light at the same time. [0003] However, in existing hybrid imaging devices, lenses are used to form two optical paths to sense and image visible light and infrared light respectively, and finally a computer processing system is used to synthesize them together. Due to the separation of the optical paths, the formed infrared image part and visible light image Some of them have large alignment deviations, which seriously...

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Problems solved by technology

[0003] However, in the existing hybrid imaging devices, lenses are used to form two optical paths to sense and image visible light and infrared light respectively, and finally a computer processing system is used to synthesize them together. Due to the separation of the optical paths, the formed infrared image part and visible light image Some of them have large alignment deviations, which seriously affect the imaging quality

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