Preparation system and method for multi-element composite coating

Abstract

The invention relates to the technical filed of preparation of composite coatings and discloses a preparation system and method for a multi-element composite coating. The preparation system comprises a plurality of arc sources, a magnetic field pipeline and a vacuum cavity, wherein the multiple arc sources are used for arcing various target materials respectively to generate various kinds of plasma correspondingly and making the various kinds of plasma move; the magnetic field pipeline is used for evenly mixing the various kinds of plasma through magnetic field constraint and making the various kinds of plasma reach the surface of a base body to be machined at the same time, and one end of the magnetic field pipeline is communicated with the corresponding arc source; the vacuum cavity is communicated with the other end of the magnetic field pipeline, the base body to be machined is placed in the vacuum cavity, and the various kinds of plasma enters the vacuum chamber and impacts the surface of the base body to be machined under the action of bias voltage, so that the multi-element coating is formed. According to the preparation system and method for the multi-element composite coating, the plasma generated by the multiple pure metal target materials is evenly mixed through the magnetic field mixing technique, and the surface of the base body to be machined is impacted at an accelerated speed through the plasma, so that the multi-element alloy coating is formed, and the purpose of preparing the coating which is stable in performance and uniform in element at a low cost is achieved.

Description

technical field [0001] The present invention relates to the technical field of composite coating preparation, in particular to a preparation system and method of multi-component composite coating. Background technique [0002] According to statistics, in modern machining, the main tool materials are high-speed steel and cemented carbide, accounting for 97% to 98% of the total number of tools. Among them, the proportion of coated high-speed steel and coated cemented carbide tools is increasing year by year. The proportion of uncoated tools is decreasing year by year, so coated tools are one of the main development tools in machining at home and abroad, and have great development prospects. [0003] TiN, TiC and A1 2 O 3 It was the earliest hard coating material, and later developed into TiCN coating by combining the advantages of TiC and TiN; then introduced metal elements such as Al and Cr, and developed binary alloy coatings such as AlTiN and AlCrN, which were successfull...

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Problems solved by technology

[0007] The purpose of the present invention is to provide a multi-component composite coating preparation system and its method, aiming to solve the problem of uneven composition, unstable performance and production cost in the prior art of using alloy targets and mosaic targets to prepare multi-component composite coatings. higher question

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