Preparation system and method of multi-component composite coating

Abstract

The invention relates to the technical field of composite coating preparation, and discloses a multi-component composite coating preparation system and method thereof. The system includes: a plurality of arc sources, which are used to respectively generate arcs for various targets to generate various plasmas Body, and make a variety of plasma movement; magnetic field pipeline, used to confine and uniformly mix various plasmas through a magnetic field, and make them reach the surface of the substrate to be processed at the same time, one end of the magnetic field pipeline communicates with the corresponding arc source; vacuum The chamber communicates with the other end of the magnetic field pipeline, and the substrate to be processed is set in the vacuum chamber. Various plasmas enter the vacuum chamber and strike the surface of the substrate to be processed under the action of bias to form a multi-layer coating. The invention adopts the magnetic field mixing technology to uniformly mix the plasma generated by a plurality of pure metal targets, and accelerates these plasmas to impact the surface of the substrate to be processed to form a multi-element alloy coating, which realizes the low-cost preparation with stable performance, The purpose of a uniform coating of composition.

Description

technical field [0001] The invention relates to the technical field of composite coating preparation, in particular to a preparation system and method of multi-element composite coating. Background technique [0002] According to statistics, in modern machining, the main cutting tool materials are high-speed steel and hard alloy, accounting for 97% to 98% of the total cutting tools. Among them, the proportion of coated high-speed steel and coated hard alloy cutting tools is increasing year by year. The proportion of uncoated cutting tools is decreasing year by year, so coated cutting tools are one of the main development tools in domestic and foreign machining, and have great development prospects. [0003] TiN, TiC and Al 2 o 3 It was the earliest hard coating material, and later combined the advantages of TiC and TiN to develop into TiCN coating; then introduced Al, Cr and other metal elements to develop binary alloy coatings such as AlTiN and AlCrN, and successfully app...

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Problems solved by technology

[0007] The purpose of the present invention is to provide a multi-component composite coating preparation system and its method, aiming to solve the problem of uneven composition, unstable performance and production cost in the prior art of using alloy targets and mosaic targets to prepare multi-component composite coatings. higher question

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