Detection method for hydrodynamic pressure, buoyancy and upward-floating distance

Abstract

The invention provides a detection method for hydrodynamic pressure, buoyancy and upward-floating distance. Hydrodynamic pressure polishing equipment for the method comprises a polishing disc, a container, a ball spline shaft, a movable plate and a side plate. The detection method comprises the steps that a piezoresistive silicon pressure sensor used for hydrodynamic pressure measurement is fixed to the bottom of the container; a piezoelectric force measuring sensor used for buoyancy detection is installed above the ball spline shaft; an inductance type sensor used for detecting the gap distance is fixed to the bottom of the container; and a grating reading head used for detecting the floating distance is arranged on the movable plate. According to the detection method, the micron-grade gap is small, and both pressure detection and distance detection are achieved; the upward-floating amount detection of the polishing disc rotating at a highs speed is converted into the upward-floating amount detection of the movable plate, and detection errors caused by unflatness of the surface of the polishing disc are reduced; the hydrodynamic pressure detection, the buoyancy detection, the gap distance and floating distance detection are achieved, comparison can be conducted through fitting experiment results, and the experiment precision is guaranteed.

Description

Technical field [0001] The invention relates to the technical field of precision polishing, and more specifically, to a method for detecting hydraulic pressure, buoyancy and floating distance. Background technique [0002] In recent years, with the vigorous development of the fields of optics and microelectronics and related technologies, the requirements for the surface quality of the required materials have become higher and higher, and the requirements for the surface roughness of the components are more stringent. The non-contact polishing method came into being, and it is widely used in the preparation of ultra-smooth surfaces, that is, the preparation of surfaces with a roughness root mean square value of less than 1 nm, and with higher surface accuracy and lower surface waviness. [0003] The development trend of non-contact polishing at this stage is higher precision, higher efficiency, and integration of processing and testing. However, common non-contact polishing, such a...

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Problems solved by technology

[0003] The development trend of non-contact polishing at this stage is higher precision, higher efficiency, and integration of processing and inspection. However, common non-contact polishing, such as float polishing and dynamic pressure float-off polishing, do not have complete hydraulic Pressure detection technology and polishing gap detection technology, the processing status of the workpiece is difficult to know, reliable working conditions and processing parameters cannot be guaranteed, so the surface quality of the processed workpiece is difficult to break through

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